JPS6488139A - Surface inspecting device - Google Patents

Surface inspecting device

Info

Publication number
JPS6488139A
JPS6488139A JP24393887A JP24393887A JPS6488139A JP S6488139 A JPS6488139 A JP S6488139A JP 24393887 A JP24393887 A JP 24393887A JP 24393887 A JP24393887 A JP 24393887A JP S6488139 A JPS6488139 A JP S6488139A
Authority
JP
Japan
Prior art keywords
data
circuit
value
register
defect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24393887A
Other languages
Japanese (ja)
Inventor
Chiaki Fukazawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP24393887A priority Critical patent/JPS6488139A/en
Publication of JPS6488139A publication Critical patent/JPS6488139A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To securely decide a defect in the surface of a body to be inspected by dividing a detection signal by prescribed length, extracting a maximum and a minimum value, comparing a reference value calculated from the extracted maximum and minimum values with a detection signal and deciding the defect. CONSTITUTION:A comparing circuit 2a operates with a timing signal outputted at each scanning period and compares stored data B in a register 4a with detection data A, and the register 4a is stored with gradually increasing data among inspection data A obtained by scanning each specific small area. Similarly, a comparing circuit 2b also operates and a register 4b is stored with gradually decreasing data among the detection data A in order. Then a subtracting circuit 7 subtracts the minimum value from the maximum value of the specific small area, an averaging circuit 8 operates at each period longer than the scanning period to calculate a means value, and a discriminating circuit 9 selects specific information due to the defect among pieces of detection information in consideration of the mean value.
JP24393887A 1987-09-30 1987-09-30 Surface inspecting device Pending JPS6488139A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24393887A JPS6488139A (en) 1987-09-30 1987-09-30 Surface inspecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24393887A JPS6488139A (en) 1987-09-30 1987-09-30 Surface inspecting device

Publications (1)

Publication Number Publication Date
JPS6488139A true JPS6488139A (en) 1989-04-03

Family

ID=17111267

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24393887A Pending JPS6488139A (en) 1987-09-30 1987-09-30 Surface inspecting device

Country Status (1)

Country Link
JP (1) JPS6488139A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009288128A (en) * 2008-05-30 2009-12-10 Mitsubishi Electric Corp Radar device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009288128A (en) * 2008-05-30 2009-12-10 Mitsubishi Electric Corp Radar device

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