JPS648628A - Gas etching - Google Patents
Gas etchingInfo
- Publication number
- JPS648628A JPS648628A JP16473287A JP16473287A JPS648628A JP S648628 A JPS648628 A JP S648628A JP 16473287 A JP16473287 A JP 16473287A JP 16473287 A JP16473287 A JP 16473287A JP S648628 A JPS648628 A JP S648628A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- etching
- ratio
- sulfur
- gasified
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16473287A JPS648628A (en) | 1987-06-30 | 1987-06-30 | Gas etching |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16473287A JPS648628A (en) | 1987-06-30 | 1987-06-30 | Gas etching |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS648628A true JPS648628A (en) | 1989-01-12 |
Family
ID=15798850
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16473287A Pending JPS648628A (en) | 1987-06-30 | 1987-06-30 | Gas etching |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS648628A (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5211790A (en) * | 1991-02-26 | 1993-05-18 | Sony Corporation | Dry etching method by sulfur conditioning |
US5268070A (en) * | 1991-01-22 | 1993-12-07 | Sony Corporation | Dry etching method |
US5314576A (en) * | 1992-06-09 | 1994-05-24 | Sony Corporation | Dry etching method using (SN)x protective layer |
US5391244A (en) * | 1992-02-14 | 1995-02-21 | Sony Corporation | Dry etching method |
US5397431A (en) * | 1992-07-24 | 1995-03-14 | Sony Corporation | Dry etching method |
-
1987
- 1987-06-30 JP JP16473287A patent/JPS648628A/ja active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5268070A (en) * | 1991-01-22 | 1993-12-07 | Sony Corporation | Dry etching method |
US5211790A (en) * | 1991-02-26 | 1993-05-18 | Sony Corporation | Dry etching method by sulfur conditioning |
US5391244A (en) * | 1992-02-14 | 1995-02-21 | Sony Corporation | Dry etching method |
US5314576A (en) * | 1992-06-09 | 1994-05-24 | Sony Corporation | Dry etching method using (SN)x protective layer |
US5397431A (en) * | 1992-07-24 | 1995-03-14 | Sony Corporation | Dry etching method |
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