JPS6484681A - Laser apparatus - Google Patents

Laser apparatus

Info

Publication number
JPS6484681A
JPS6484681A JP62241067A JP24106787A JPS6484681A JP S6484681 A JPS6484681 A JP S6484681A JP 62241067 A JP62241067 A JP 62241067A JP 24106787 A JP24106787 A JP 24106787A JP S6484681 A JPS6484681 A JP S6484681A
Authority
JP
Japan
Prior art keywords
wavelength
enclosure
fabry
hermetically sealed
perot etalon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62241067A
Other languages
Japanese (ja)
Inventor
Hajime Nakatani
Yoshifumi Minowa
Hitoshi Wakata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP62241067A priority Critical patent/JPS6484681A/en
Priority to KR1019880011294A priority patent/KR910006307B1/en
Priority to GB888822057A priority patent/GB8822057D0/en
Priority to CA000578170A priority patent/CA1282820C/en
Priority to US07/248,900 priority patent/US4914662A/en
Priority to DE3832636A priority patent/DE3832636A1/en
Priority to GB8823340A priority patent/GB2210496B/en
Publication of JPS6484681A publication Critical patent/JPS6484681A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
    • H01S3/131—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the active medium, e.g. by controlling the processes or apparatus for excitation

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
  • Laser Beam Processing (AREA)

Abstract

PURPOSE:To enable stabilization of wavelength to be performed without being affected by both the ambient temperature and the pressure change, by employing a specific structure in which a Fabry-Perot etalon is placed in a hermetically sealed enclosure, and the enclosure is held at the predetermined temperature by a temperature regulating means. CONSTITUTION:A wavelength monitoring mechanism is composed of an integrator 16, a Fabry-Perot etalon 17 and lens 19. Now, the Fabry-Perot etalon 17 is placed in a hermetically sealed enclosure 18, and the enclosure 18 is held at the predetermined temperature. The laser beam 11 emitted from a laser oscillator 1, in which the oscillation wavelength is variable, is monitored by the monitoring mechanism without being affected by both the ambient temperature and the pressure change. The output signal from the monitoring mechanism is fed back through both a picture processing means 23 and a driving mechanism 10 to a container expanding and contracting means 9 so that the pressure in the hermetically sealed enclosure 4 is regulated. As a result, the stable wavelength regulation of the oscillator can be performed.
JP62241067A 1987-09-26 1987-09-26 Laser apparatus Pending JPS6484681A (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP62241067A JPS6484681A (en) 1987-09-26 1987-09-26 Laser apparatus
KR1019880011294A KR910006307B1 (en) 1987-09-26 1988-09-01 Laser wavelength stabilization
GB888822057A GB8822057D0 (en) 1987-09-26 1988-09-20 Laser wavelength stabilization
CA000578170A CA1282820C (en) 1987-09-26 1988-09-22 Laser wavelength stabilization
US07/248,900 US4914662A (en) 1987-09-26 1988-09-26 Laser wavelength stabilization
DE3832636A DE3832636A1 (en) 1987-09-26 1988-09-26 METHOD AND DEVICE FOR STABILIZING THE WAVELENGTH OF A LASER BEAM
GB8823340A GB2210496B (en) 1987-09-26 1988-10-05 Laser wavelength stabilization

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62241067A JPS6484681A (en) 1987-09-26 1987-09-26 Laser apparatus

Publications (1)

Publication Number Publication Date
JPS6484681A true JPS6484681A (en) 1989-03-29

Family

ID=17068806

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62241067A Pending JPS6484681A (en) 1987-09-26 1987-09-26 Laser apparatus

Country Status (2)

Country Link
JP (1) JPS6484681A (en)
GB (1) GB8822057D0 (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6484767A (en) * 1987-09-28 1989-03-30 Matsushita Electric Ind Co Ltd Tunable laser device
JPH01155673A (en) * 1987-12-14 1989-06-19 Canon Inc Laser wavelength control device
JPH01302884A (en) * 1988-05-31 1989-12-06 Matsushita Electric Ind Co Ltd Wavelength-stabilized laser apparatus
JPH01310583A (en) * 1988-06-09 1989-12-14 Matsushita Electric Ind Co Ltd Variable wavelength laser device
JPH04250678A (en) * 1990-04-23 1992-09-07 Coherent Inc Laser
JPH06338652A (en) * 1993-05-31 1994-12-06 Nec Corp Stabilization of wavelength of laser and semiconductor laser module for wavelength stabilization
US5387974A (en) * 1992-05-15 1995-02-07 Mitsubishi Denki Kabushiki Kaisha Laser apparatus including Fabry-perot wavelength detector with temperature and wavelength compensation
JPH07283465A (en) * 1994-04-12 1995-10-27 Nippon Steel Corp Q-switched co2 laser
JPWO2018016066A1 (en) * 2016-07-22 2019-05-09 ギガフォトン株式会社 Narrow-band KrF excimer laser device

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6484767A (en) * 1987-09-28 1989-03-30 Matsushita Electric Ind Co Ltd Tunable laser device
JPH01155673A (en) * 1987-12-14 1989-06-19 Canon Inc Laser wavelength control device
JPH01302884A (en) * 1988-05-31 1989-12-06 Matsushita Electric Ind Co Ltd Wavelength-stabilized laser apparatus
JPH01310583A (en) * 1988-06-09 1989-12-14 Matsushita Electric Ind Co Ltd Variable wavelength laser device
JPH04250678A (en) * 1990-04-23 1992-09-07 Coherent Inc Laser
US5387974A (en) * 1992-05-15 1995-02-07 Mitsubishi Denki Kabushiki Kaisha Laser apparatus including Fabry-perot wavelength detector with temperature and wavelength compensation
JPH06338652A (en) * 1993-05-31 1994-12-06 Nec Corp Stabilization of wavelength of laser and semiconductor laser module for wavelength stabilization
JPH07283465A (en) * 1994-04-12 1995-10-27 Nippon Steel Corp Q-switched co2 laser
JPWO2018016066A1 (en) * 2016-07-22 2019-05-09 ギガフォトン株式会社 Narrow-band KrF excimer laser device

Also Published As

Publication number Publication date
GB8822057D0 (en) 1988-10-19

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