JPS6484767A - Tunable laser device - Google Patents

Tunable laser device

Info

Publication number
JPS6484767A
JPS6484767A JP62243359A JP24335987A JPS6484767A JP S6484767 A JPS6484767 A JP S6484767A JP 62243359 A JP62243359 A JP 62243359A JP 24335987 A JP24335987 A JP 24335987A JP S6484767 A JPS6484767 A JP S6484767A
Authority
JP
Japan
Prior art keywords
wavelength
signal
pressure
airtight chamber
central
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62243359A
Other languages
Japanese (ja)
Inventor
Koichi Wani
Yasuhiro Shimada
Tadaaki Miki
Yoshiro Ogata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP62243359A priority Critical patent/JPS6484767A/en
Priority to CA000578540A priority patent/CA1302548C/en
Priority to EP88115902A priority patent/EP0310000B1/en
Priority to DE3889831T priority patent/DE3889831T2/en
Publication of JPS6484767A publication Critical patent/JPS6484767A/en
Priority to US07/499,206 priority patent/US4991178A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
    • H01S3/1062—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using a controlled passive interferometer, e.g. a Fabry-Perot etalon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
    • H01S3/136—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling devices placed within the cavity
    • H01S3/137—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling devices placed within the cavity for stabilising of frequency
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Lasers (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE:To set a central wavelength at an arbitrary definite value by a method wherein at least one wavelength-selecting element is installed in an airtight chamber and a pressure control means used to control a pressure of a gas inside the airtight chamber and a central-wavelength detection means used to detect the central wavelength of a laser beam are installed. CONSTITUTION:An air space etalon 4 as a wavelength-selecting element and a reflection-type grating 5 are arranged on an optical axis of an optical resonator; both are installed inside an airtight chamber 6. A high-pressure air source 7 and a low-pressure air source 8 are connected to the airtight chamber 6 via respective valves 9, 10, and change the air pressure between gaps of the air space etalon 4 and around the grating 5. A wavelength detector 12 inputs a signal corresponding to a central wavelength of a sample beam to a comparator 13. The comparator 13 compares a signal with the reference signal which is sent from the wavelength detector 12, and outputs a signal to be used to open or shut the valve 9 or 10 in accordance with a deviation amount. The comparator 13 controls a selection wavelength of the wavelength signal wavelength- selecting element and fixes the central wavelength of a laser beam at a definite value.
JP62243359A 1987-09-28 1987-09-28 Tunable laser device Pending JPS6484767A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP62243359A JPS6484767A (en) 1987-09-28 1987-09-28 Tunable laser device
CA000578540A CA1302548C (en) 1987-09-28 1988-09-27 Laser apparatus
EP88115902A EP0310000B1 (en) 1987-09-28 1988-09-27 Laser apparatus
DE3889831T DE3889831T2 (en) 1987-09-28 1988-09-27 Laser apparatus.
US07/499,206 US4991178A (en) 1987-09-28 1990-03-19 Laser apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62243359A JPS6484767A (en) 1987-09-28 1987-09-28 Tunable laser device

Publications (1)

Publication Number Publication Date
JPS6484767A true JPS6484767A (en) 1989-03-30

Family

ID=17102665

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62243359A Pending JPS6484767A (en) 1987-09-28 1987-09-28 Tunable laser device

Country Status (1)

Country Link
JP (1) JPS6484767A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02307281A (en) * 1989-05-23 1990-12-20 Komatsu Ltd Wavelength detector
JPH036011A (en) * 1989-06-02 1991-01-11 Nec Yamagata Ltd Wafer aligner for semiconductor-device manufacture
JPH0476976A (en) * 1990-07-19 1992-03-11 Komatsu Ltd Narrow-band oscillation laser device
JP2002329911A (en) * 2001-04-27 2002-11-15 Komatsu Ltd Laser device, amplifier and ultraviolet laser device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6216589A (en) * 1985-07-16 1987-01-24 Toshiba Corp Laser device for separating isotope
JPS6422087A (en) * 1987-07-17 1989-01-25 Komatsu Mfg Co Ltd Control equipment for laser wavelength
JPS6484681A (en) * 1987-09-26 1989-03-29 Mitsubishi Electric Corp Laser apparatus

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6216589A (en) * 1985-07-16 1987-01-24 Toshiba Corp Laser device for separating isotope
JPS6422087A (en) * 1987-07-17 1989-01-25 Komatsu Mfg Co Ltd Control equipment for laser wavelength
JPS6484681A (en) * 1987-09-26 1989-03-29 Mitsubishi Electric Corp Laser apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02307281A (en) * 1989-05-23 1990-12-20 Komatsu Ltd Wavelength detector
JPH036011A (en) * 1989-06-02 1991-01-11 Nec Yamagata Ltd Wafer aligner for semiconductor-device manufacture
JPH0476976A (en) * 1990-07-19 1992-03-11 Komatsu Ltd Narrow-band oscillation laser device
JP2002329911A (en) * 2001-04-27 2002-11-15 Komatsu Ltd Laser device, amplifier and ultraviolet laser device

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