JPS6484561A - Secondary ion mass analyzer - Google Patents
Secondary ion mass analyzerInfo
- Publication number
- JPS6484561A JPS6484561A JP62242131A JP24213187A JPS6484561A JP S6484561 A JPS6484561 A JP S6484561A JP 62242131 A JP62242131 A JP 62242131A JP 24213187 A JP24213187 A JP 24213187A JP S6484561 A JPS6484561 A JP S6484561A
- Authority
- JP
- Japan
- Prior art keywords
- secondary ion
- recorder
- sample
- ion
- potential
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Tubes For Measurement (AREA)
Abstract
PURPOSE:To obtain information required for analysis of data on the secondary ion intensity, in particular, profile of the secondary ion in the depth direction by indicating sample potential at the time of measurement along with data on the secondary ion mass analysis simultaneously on a recorder. CONSTITUTION:Secondary ions generated from a sample 2a are extracted at high potential at a secondary ion extracting electrode 3. The secondary ion pass through an energy separator 4 by electric field and further pass through a mass separator 5 by magnetic field and enter an ion detector 6 after being classified. The signal from the ion detector 6 is input into a recorder 8 through a signal processor 7. On the other hand, a high impedance potentiometer 9 measures potential difference between the sample 2a and the secondary ion extracting electrode 3, and the measured value is recorded in and indicated on the recorder through an A-D convertor 10 along with secondary ion intensity.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62242131A JPS6484561A (en) | 1987-09-25 | 1987-09-25 | Secondary ion mass analyzer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62242131A JPS6484561A (en) | 1987-09-25 | 1987-09-25 | Secondary ion mass analyzer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6484561A true JPS6484561A (en) | 1989-03-29 |
Family
ID=17084768
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62242131A Pending JPS6484561A (en) | 1987-09-25 | 1987-09-25 | Secondary ion mass analyzer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6484561A (en) |
-
1987
- 1987-09-25 JP JP62242131A patent/JPS6484561A/en active Pending
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