JPS571960A - Ion microanalyzer - Google Patents

Ion microanalyzer

Info

Publication number
JPS571960A
JPS571960A JP7432180A JP7432180A JPS571960A JP S571960 A JPS571960 A JP S571960A JP 7432180 A JP7432180 A JP 7432180A JP 7432180 A JP7432180 A JP 7432180A JP S571960 A JPS571960 A JP S571960A
Authority
JP
Japan
Prior art keywords
captured
specimen
secondary ions
mass number
collector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7432180A
Other languages
Japanese (ja)
Inventor
Eiichi Izumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7432180A priority Critical patent/JPS571960A/en
Publication of JPS571960A publication Critical patent/JPS571960A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To analyze a plurality of elements in the direction of depth of a specimen by one measurement, by periodically detecting the secondary ions having different mass numbers, as an electrical signal, among the ions obtained by scanning the specimen by an ion beam. CONSTITUTION:When the specimen 2 is scanned by the ion beam, the secondary ions are generated. The secondary ions having a specified mass number only are captured by an ion collector 8 through a magntic field 7 in a specimen analyzer. The magnetic field power source 9 sets the value of the magnetic field so that the secondary ions having the mass number M1 are captured by the collector 8 at the first period of a Y axis raw tooth wave, those having mass number M2 are captured at the second period, those having mass number M3 are captured at the third period, and the capturing is repeated periodically. The secondary ions having the mass numbers M1-M3 captured by the collector 8 are sequentially recorded in a recorder 17 as the electric signal via a calculator 11, a selector 12, memory units 13a-13c, and the like. In this constitution, the intensity curves of the secondary ions having mass numbers M1-M3 for various depths of the specimen 2 are obtained, and the analysis can be performed by one measurement.
JP7432180A 1980-06-04 1980-06-04 Ion microanalyzer Pending JPS571960A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7432180A JPS571960A (en) 1980-06-04 1980-06-04 Ion microanalyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7432180A JPS571960A (en) 1980-06-04 1980-06-04 Ion microanalyzer

Publications (1)

Publication Number Publication Date
JPS571960A true JPS571960A (en) 1982-01-07

Family

ID=13543729

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7432180A Pending JPS571960A (en) 1980-06-04 1980-06-04 Ion microanalyzer

Country Status (1)

Country Link
JP (1) JPS571960A (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5081386A (en) * 1973-11-19 1975-07-02
JPS53122483A (en) * 1977-03-31 1978-10-25 Shimadzu Corp Monitor apparatus of ion microanalyzer, or the like
JPS5439758A (en) * 1978-03-27 1979-03-27 Taiyou Kairiku Kanamono Seisak Clip for securing crossing portion of steel rod and wire and like assembled in lattice form

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5081386A (en) * 1973-11-19 1975-07-02
JPS53122483A (en) * 1977-03-31 1978-10-25 Shimadzu Corp Monitor apparatus of ion microanalyzer, or the like
JPS5439758A (en) * 1978-03-27 1979-03-27 Taiyou Kairiku Kanamono Seisak Clip for securing crossing portion of steel rod and wire and like assembled in lattice form

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