JPS6482613A - Chemical vapor growth equipment - Google Patents
Chemical vapor growth equipmentInfo
- Publication number
- JPS6482613A JPS6482613A JP24140487A JP24140487A JPS6482613A JP S6482613 A JPS6482613 A JP S6482613A JP 24140487 A JP24140487 A JP 24140487A JP 24140487 A JP24140487 A JP 24140487A JP S6482613 A JPS6482613 A JP S6482613A
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- cooling
- piping
- vapor growth
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
PURPOSE:To improve the equipment operating efficiency by providing a cooling pipe which contacts a cooling fluid with the susceptor to forcibly cool the susceptor, thereby quickly cooling a crystal substrate after the completion of a vapor growth. CONSTITUTION:A cooling piping 21 through the bottom of a reaction tube 11, and the gas nozzles 22 of this piping 21 are placed oppositely and closely to the bottom of a susceptor 15. Into a gas inlet port 23 of the piping 21 is introduced a cooling gas, for instance, H2 through valves 24, 25, whereby H2 is caused to blow against the bottom of the susceptor 15. By causing a cooling gas such as H2 to blow against the susceptor 15 through the piping 21 after the completion of a vapor growth in this way, a crystal substrate 14 can quickly be cooled along with the susceptor 15.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24140487A JPS6482613A (en) | 1987-09-25 | 1987-09-25 | Chemical vapor growth equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24140487A JPS6482613A (en) | 1987-09-25 | 1987-09-25 | Chemical vapor growth equipment |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6482613A true JPS6482613A (en) | 1989-03-28 |
Family
ID=17073778
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP24140487A Pending JPS6482613A (en) | 1987-09-25 | 1987-09-25 | Chemical vapor growth equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6482613A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6158938A (en) * | 1998-03-11 | 2000-12-12 | Illinois Tool Works Inc | Anti-cross threading fastener |
-
1987
- 1987-09-25 JP JP24140487A patent/JPS6482613A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6158938A (en) * | 1998-03-11 | 2000-12-12 | Illinois Tool Works Inc | Anti-cross threading fastener |
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