JPS6482613A - Chemical vapor growth equipment - Google Patents

Chemical vapor growth equipment

Info

Publication number
JPS6482613A
JPS6482613A JP24140487A JP24140487A JPS6482613A JP S6482613 A JPS6482613 A JP S6482613A JP 24140487 A JP24140487 A JP 24140487A JP 24140487 A JP24140487 A JP 24140487A JP S6482613 A JPS6482613 A JP S6482613A
Authority
JP
Japan
Prior art keywords
susceptor
cooling
piping
vapor growth
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24140487A
Other languages
Japanese (ja)
Inventor
Keiichi Akagawa
Isao Matsui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP24140487A priority Critical patent/JPS6482613A/en
Publication of JPS6482613A publication Critical patent/JPS6482613A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

PURPOSE:To improve the equipment operating efficiency by providing a cooling pipe which contacts a cooling fluid with the susceptor to forcibly cool the susceptor, thereby quickly cooling a crystal substrate after the completion of a vapor growth. CONSTITUTION:A cooling piping 21 through the bottom of a reaction tube 11, and the gas nozzles 22 of this piping 21 are placed oppositely and closely to the bottom of a susceptor 15. Into a gas inlet port 23 of the piping 21 is introduced a cooling gas, for instance, H2 through valves 24, 25, whereby H2 is caused to blow against the bottom of the susceptor 15. By causing a cooling gas such as H2 to blow against the susceptor 15 through the piping 21 after the completion of a vapor growth in this way, a crystal substrate 14 can quickly be cooled along with the susceptor 15.
JP24140487A 1987-09-25 1987-09-25 Chemical vapor growth equipment Pending JPS6482613A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24140487A JPS6482613A (en) 1987-09-25 1987-09-25 Chemical vapor growth equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24140487A JPS6482613A (en) 1987-09-25 1987-09-25 Chemical vapor growth equipment

Publications (1)

Publication Number Publication Date
JPS6482613A true JPS6482613A (en) 1989-03-28

Family

ID=17073778

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24140487A Pending JPS6482613A (en) 1987-09-25 1987-09-25 Chemical vapor growth equipment

Country Status (1)

Country Link
JP (1) JPS6482613A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6158938A (en) * 1998-03-11 2000-12-12 Illinois Tool Works Inc Anti-cross threading fastener

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6158938A (en) * 1998-03-11 2000-12-12 Illinois Tool Works Inc Anti-cross threading fastener

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