JPS6481918A - Manufacture of three-dimensional optical circuit element - Google Patents

Manufacture of three-dimensional optical circuit element

Info

Publication number
JPS6481918A
JPS6481918A JP62240261A JP24026187A JPS6481918A JP S6481918 A JPS6481918 A JP S6481918A JP 62240261 A JP62240261 A JP 62240261A JP 24026187 A JP24026187 A JP 24026187A JP S6481918 A JPS6481918 A JP S6481918A
Authority
JP
Japan
Prior art keywords
rare earth
substrate
ion beam
converged
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62240261A
Other languages
Japanese (ja)
Inventor
Manabu Kagami
Takao Shiokawa
Yuzaburo Segawa
Katsunobu Aoyanagi
Susumu Nanba
Toshio Ito
Hiroshi Okada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIKEN Institute of Physical and Chemical Research
Original Assignee
RIKEN Institute of Physical and Chemical Research
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RIKEN Institute of Physical and Chemical Research filed Critical RIKEN Institute of Physical and Chemical Research
Priority to JP62240261A priority Critical patent/JPS6481918A/en
Publication of JPS6481918A publication Critical patent/JPS6481918A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
    • G02B6/1347—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms using ion implantation

Abstract

PURPOSE:To reduce the man-hours and manufacturing time required for the manufacture by drawing a three-dimensional waveguide on a substrate with a convergent ion beam which is generated by using a rare earth element as an ion seed. CONSTITUTION:The rare earth element is vaporized by being heated, then ionized, and further converged by a lens using an electric field or magnetic field to generate the converged ion beam 1 of rare earth ions. This converged ion beam 1 is deflected by the electric or magnetic field to implant rare earth ions in the surface layer of the substrate 3 in a desired pattern and the ion- implanted part of the substrate is reformed to vary in refractive index in three dimensions, thereby forming an optical waveguide 2. Thus, the three-dimensional waveguide 2 is drawn with the converged ion beam generated by using the rare earth element as the ion seed to enable the drawing on an optional substrate 3 without using any mask, so the process is facilitated and the manufacturing time is shortened.
JP62240261A 1987-09-25 1987-09-25 Manufacture of three-dimensional optical circuit element Pending JPS6481918A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62240261A JPS6481918A (en) 1987-09-25 1987-09-25 Manufacture of three-dimensional optical circuit element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62240261A JPS6481918A (en) 1987-09-25 1987-09-25 Manufacture of three-dimensional optical circuit element

Publications (1)

Publication Number Publication Date
JPS6481918A true JPS6481918A (en) 1989-03-28

Family

ID=17056865

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62240261A Pending JPS6481918A (en) 1987-09-25 1987-09-25 Manufacture of three-dimensional optical circuit element

Country Status (1)

Country Link
JP (1) JPS6481918A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994023477A1 (en) * 1993-03-26 1994-10-13 Honeywell Inc. Method of fabricating diode lasers using ion beam deposition

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5093795A (en) * 1973-12-20 1975-07-26
JPS61183609A (en) * 1985-02-09 1986-08-16 Agency Of Ind Science & Technol Manufacture of optical semiconductor device by ion implantation
JPS62276528A (en) * 1986-05-26 1987-12-01 Nippon Telegr & Teleph Corp <Ntt> Optical logic circuit

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5093795A (en) * 1973-12-20 1975-07-26
JPS61183609A (en) * 1985-02-09 1986-08-16 Agency Of Ind Science & Technol Manufacture of optical semiconductor device by ion implantation
JPS62276528A (en) * 1986-05-26 1987-12-01 Nippon Telegr & Teleph Corp <Ntt> Optical logic circuit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994023477A1 (en) * 1993-03-26 1994-10-13 Honeywell Inc. Method of fabricating diode lasers using ion beam deposition

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