JPS6481242A - Probe inspection device - Google Patents

Probe inspection device

Info

Publication number
JPS6481242A
JPS6481242A JP62237152A JP23715287A JPS6481242A JP S6481242 A JPS6481242 A JP S6481242A JP 62237152 A JP62237152 A JP 62237152A JP 23715287 A JP23715287 A JP 23715287A JP S6481242 A JPS6481242 A JP S6481242A
Authority
JP
Japan
Prior art keywords
card
fixing part
circuit
magnetically
fixing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62237152A
Other languages
Japanese (ja)
Inventor
Kiyomi Isobe
Hiroshi Asami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP62237152A priority Critical patent/JPS6481242A/en
Publication of JPS6481242A publication Critical patent/JPS6481242A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To improve operation efficiency of loading and unloading a card as well as mounting accuracy by fixing the probe card to the card fixing part magnetically. CONSTITUTION:First of all, turn on the main switch MSW to select automatic loading mode, hold a card 8 with hands in this status, match guide pins 8a and 8b of this card 8 guide holes 4a and 4b provided at a card fixing part 1 when fixing a probe card 8 to the card fixing part 1. Then, push this card 8 up to the card fixing part 1. It allows the guide pins 8a and 8b to enter the guide holes 4a and 4b to enable both switches SW1 and SW2 to be turned on. As a result, pulse signal enters the input of AND circuit (AND) from a pulse generating circuit 5. Thus, output signal generated from this AND circuit (AND) activates a DC power supply 3 to allow current to flow into a coil 2b and to activate and electromagnet 2 for adsorbing a magnetic body 9 provided at the card 8. And this card 8 is fixed to the card fixing part 1 magnetically.
JP62237152A 1987-09-24 1987-09-24 Probe inspection device Pending JPS6481242A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62237152A JPS6481242A (en) 1987-09-24 1987-09-24 Probe inspection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62237152A JPS6481242A (en) 1987-09-24 1987-09-24 Probe inspection device

Publications (1)

Publication Number Publication Date
JPS6481242A true JPS6481242A (en) 1989-03-27

Family

ID=17011173

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62237152A Pending JPS6481242A (en) 1987-09-24 1987-09-24 Probe inspection device

Country Status (1)

Country Link
JP (1) JPS6481242A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01170876A (en) * 1987-12-25 1989-07-05 Tokyo Electron Ltd Probe device
JP2008288286A (en) * 2007-05-15 2008-11-27 Japan Electronic Materials Corp Semiconductor testing device
GB2526110A (en) * 2014-05-14 2015-11-18 Diagnosys Test Systems Ltd Device testing
WO2020093772A1 (en) * 2018-11-09 2020-05-14 广东电网有限责任公司 Superconducting tape testing device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01170876A (en) * 1987-12-25 1989-07-05 Tokyo Electron Ltd Probe device
JP2008288286A (en) * 2007-05-15 2008-11-27 Japan Electronic Materials Corp Semiconductor testing device
GB2526110A (en) * 2014-05-14 2015-11-18 Diagnosys Test Systems Ltd Device testing
WO2020093772A1 (en) * 2018-11-09 2020-05-14 广东电网有限责任公司 Superconducting tape testing device

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