JPS6481242A - Probe inspection device - Google Patents
Probe inspection deviceInfo
- Publication number
- JPS6481242A JPS6481242A JP62237152A JP23715287A JPS6481242A JP S6481242 A JPS6481242 A JP S6481242A JP 62237152 A JP62237152 A JP 62237152A JP 23715287 A JP23715287 A JP 23715287A JP S6481242 A JPS6481242 A JP S6481242A
- Authority
- JP
- Japan
- Prior art keywords
- card
- fixing part
- circuit
- magnetically
- fixing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE:To improve operation efficiency of loading and unloading a card as well as mounting accuracy by fixing the probe card to the card fixing part magnetically. CONSTITUTION:First of all, turn on the main switch MSW to select automatic loading mode, hold a card 8 with hands in this status, match guide pins 8a and 8b of this card 8 guide holes 4a and 4b provided at a card fixing part 1 when fixing a probe card 8 to the card fixing part 1. Then, push this card 8 up to the card fixing part 1. It allows the guide pins 8a and 8b to enter the guide holes 4a and 4b to enable both switches SW1 and SW2 to be turned on. As a result, pulse signal enters the input of AND circuit (AND) from a pulse generating circuit 5. Thus, output signal generated from this AND circuit (AND) activates a DC power supply 3 to allow current to flow into a coil 2b and to activate and electromagnet 2 for adsorbing a magnetic body 9 provided at the card 8. And this card 8 is fixed to the card fixing part 1 magnetically.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62237152A JPS6481242A (en) | 1987-09-24 | 1987-09-24 | Probe inspection device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62237152A JPS6481242A (en) | 1987-09-24 | 1987-09-24 | Probe inspection device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6481242A true JPS6481242A (en) | 1989-03-27 |
Family
ID=17011173
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62237152A Pending JPS6481242A (en) | 1987-09-24 | 1987-09-24 | Probe inspection device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6481242A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01170876A (en) * | 1987-12-25 | 1989-07-05 | Tokyo Electron Ltd | Probe device |
JP2008288286A (en) * | 2007-05-15 | 2008-11-27 | Japan Electronic Materials Corp | Semiconductor testing device |
GB2526110A (en) * | 2014-05-14 | 2015-11-18 | Diagnosys Test Systems Ltd | Device testing |
WO2020093772A1 (en) * | 2018-11-09 | 2020-05-14 | 广东电网有限责任公司 | Superconducting tape testing device |
-
1987
- 1987-09-24 JP JP62237152A patent/JPS6481242A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01170876A (en) * | 1987-12-25 | 1989-07-05 | Tokyo Electron Ltd | Probe device |
JP2008288286A (en) * | 2007-05-15 | 2008-11-27 | Japan Electronic Materials Corp | Semiconductor testing device |
GB2526110A (en) * | 2014-05-14 | 2015-11-18 | Diagnosys Test Systems Ltd | Device testing |
WO2020093772A1 (en) * | 2018-11-09 | 2020-05-14 | 广东电网有限责任公司 | Superconducting tape testing device |
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