JPS6480082A - Laser control device - Google Patents

Laser control device

Info

Publication number
JPS6480082A
JPS6480082A JP62234794A JP23479487A JPS6480082A JP S6480082 A JPS6480082 A JP S6480082A JP 62234794 A JP62234794 A JP 62234794A JP 23479487 A JP23479487 A JP 23479487A JP S6480082 A JPS6480082 A JP S6480082A
Authority
JP
Japan
Prior art keywords
optical output
circuit
setting
voltage
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62234794A
Other languages
Japanese (ja)
Inventor
Nobuo Eto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP62234794A priority Critical patent/JPS6480082A/en
Publication of JPS6480082A publication Critical patent/JPS6480082A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
    • H01S3/131—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the active medium, e.g. by controlling the processes or apparatus for excitation
    • H01S3/134—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the active medium, e.g. by controlling the processes or apparatus for excitation in gas lasers

Abstract

PURPOSE:To inhibit swiftly the fluctuation of an optical output by a method wherein a value that the deviation between an optical output feedback signal and an optical output setting signal is corrected and operated at every one time and a time function are used in setting a set voltage for a voltage control. CONSTITUTION:A laser beam from a laser oscillator 21 is converted into a proper signal level by a photodetecting circuit 23 for feedback-controlling. An arithmetic circuit 24 decides a voltage setting reference according to the setting of an optical output and the deviation of the detection circuit 23. A timing control circuit 27 controls the operation timings of a power supply 22 for controlling a voltage to be applied to the oscillator 21, the circuit 23, the circuit 24, a function generating circuit 25 for generating a correction signal, which is a temporal function, and an initial voltage setting circuit 26 for setting a proper applying voltage to the oscillator according to the setting of an optical output. Thereby, a value that the deviation between an optical output feedback signal and an optical output signal is corrected and operated at every one time and a temporal function are used as a set voltage for a voltage control and the fluctuation of an optical output due to the number of an oscillation-repetition rate and the fluctuation of oscillation efficiency can be inhibited swiftly.
JP62234794A 1987-09-21 1987-09-21 Laser control device Pending JPS6480082A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62234794A JPS6480082A (en) 1987-09-21 1987-09-21 Laser control device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62234794A JPS6480082A (en) 1987-09-21 1987-09-21 Laser control device

Publications (1)

Publication Number Publication Date
JPS6480082A true JPS6480082A (en) 1989-03-24

Family

ID=16976495

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62234794A Pending JPS6480082A (en) 1987-09-21 1987-09-21 Laser control device

Country Status (1)

Country Link
JP (1) JPS6480082A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02246287A (en) * 1989-03-20 1990-10-02 Matsushita Electric Ind Co Ltd Pulse light source
JPH0511467U (en) * 1991-07-24 1993-02-12 日新電機株式会社 Excimer laser device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02246287A (en) * 1989-03-20 1990-10-02 Matsushita Electric Ind Co Ltd Pulse light source
JPH0511467U (en) * 1991-07-24 1993-02-12 日新電機株式会社 Excimer laser device

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