JPS57143254A - Electron-beam-current controlling device - Google Patents

Electron-beam-current controlling device

Info

Publication number
JPS57143254A
JPS57143254A JP56029095A JP2909581A JPS57143254A JP S57143254 A JPS57143254 A JP S57143254A JP 56029095 A JP56029095 A JP 56029095A JP 2909581 A JP2909581 A JP 2909581A JP S57143254 A JPS57143254 A JP S57143254A
Authority
JP
Japan
Prior art keywords
voltage
signal
time
radiation
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56029095A
Other languages
Japanese (ja)
Other versions
JPS6326504B2 (en
Inventor
Seiichi Tsukamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP56029095A priority Critical patent/JPS57143254A/en
Publication of JPS57143254A publication Critical patent/JPS57143254A/en
Publication of JPS6326504B2 publication Critical patent/JPS6326504B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals

Abstract

PURPOSE:To shorten the time from the on-signal of the electron beam to the radiation of the beam, and increase the treatment ability of an electron-beam- current controlling device by supplying a pulse, which can reduce bias voltage of an excessive bias state to a cut-off level, from outside an automatic control loop for a beam current during the initiation of the beam radiation. CONSTITUTION:Corrective voltage, which has a polarity reverse to that of signal voltage produced with a cut-off bias voltage regulator 24 and has a magnitude proportional to that of the above signal voltage, is produced with an inversion amplifier 32. The corrective voltage, is produced with an inversion amplifier 32. The corrective voltage sent from the inversion amplifier 32 is applied to a damping circuit 15 by means of a one shot pulse generator 33 which closes a correction switch 31 from the time when a beam-on signal sent from a switch 23' interlocking with a beam-on-off switch 23 rises until the time when the bias voltage decreases approximately to a cut-off level. As a result, the time from the on-signal of the electron beam to the actual radiation of the electron beam can be shortened, and the treatment ability of the electron beam radiation can be increased.
JP56029095A 1981-02-27 1981-02-27 Electron-beam-current controlling device Granted JPS57143254A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56029095A JPS57143254A (en) 1981-02-27 1981-02-27 Electron-beam-current controlling device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56029095A JPS57143254A (en) 1981-02-27 1981-02-27 Electron-beam-current controlling device

Publications (2)

Publication Number Publication Date
JPS57143254A true JPS57143254A (en) 1982-09-04
JPS6326504B2 JPS6326504B2 (en) 1988-05-30

Family

ID=12266789

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56029095A Granted JPS57143254A (en) 1981-02-27 1981-02-27 Electron-beam-current controlling device

Country Status (1)

Country Link
JP (1) JPS57143254A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6224546A (en) * 1985-07-25 1987-02-02 Mitsubishi Electric Corp Electron beam machining apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6224546A (en) * 1985-07-25 1987-02-02 Mitsubishi Electric Corp Electron beam machining apparatus

Also Published As

Publication number Publication date
JPS6326504B2 (en) 1988-05-30

Similar Documents

Publication Publication Date Title
JPS5719166A (en) Pulse arc welding device
JPS544581A (en) Stabilizing control system of light output levels and light output waveforms of semiconductor laser
JPS57143254A (en) Electron-beam-current controlling device
JPS5490528A (en) Digital-controlling power converter
JPS54136617A (en) Digital control of motor
JPS51127671A (en) Power supply for electron gun
JPS55147477A (en) Arc welding machine
JPS5697604A (en) Controller for oil-hydraulic cylinder
JPS51120156A (en) Agc circuit
JPS5420311A (en) Tachometer generator
JPS5798A (en) Automatic voltage adjusting device
JPS56132172A (en) Rectification circuit
UST961002I4 (en) Electron current regulator for an electron discharge device
JPS5291426A (en) Electromagnetically controlled camera lens aperture control system
JPS51129589A (en) A control apparatus
JPS5442596A (en) Source of nuclear fussion device
JPS5577216A (en) Shock sound preventive circuit
JPS5747582A (en) Output controller for welding machine
JPS531821A (en) Dc-ac converter
JPS5566844A (en) Electron beam generating apparatus
JPS53120244A (en) Automatic gain control circuit
JPS5635399A (en) Power source device
JPS5369522A (en) Vertical deflecting device
JPS5399410A (en) Controller for thyristor motor
JPS51121756A (en) Controller for voltage fluctuation