JPS6479325A - Method for evaporating metal element or metal compound - Google Patents

Method for evaporating metal element or metal compound

Info

Publication number
JPS6479325A
JPS6479325A JP62237784A JP23778487A JPS6479325A JP S6479325 A JPS6479325 A JP S6479325A JP 62237784 A JP62237784 A JP 62237784A JP 23778487 A JP23778487 A JP 23778487A JP S6479325 A JPS6479325 A JP S6479325A
Authority
JP
Japan
Prior art keywords
metal
molten
induced current
conductors
coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62237784A
Other languages
Japanese (ja)
Inventor
Kagetaka Amano
Hiromichi Horie
Tatsuhiko Matsumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP62237784A priority Critical patent/JPS6479325A/en
Publication of JPS6479325A publication Critical patent/JPS6479325A/en
Pending legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00—Technologies related to metal processing
    • Y02P10/20—Recycling
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00—Technologies related to metal processing
    • Y02P10/25—Process efficiency

Landscapes

  • Manufacture And Refinement Of Metals (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To efficiently generate the metal vapor which is not stained by a vessel, etc., by heating the metal or metal compd. by the Joule heat generated by induced current and holding the metal, etc., in a specified shape on the lower support under the stress generated by electromagnetic interaction between an external AC electromagnetic field and the induced current. CONSTITUTION:Ti is placed on the support 4 consisting of a Ti bar and divided conductors 5 made of copper are disposed in a cylindrical shape on the outside circumference thereof and a coil 7 is disposed on the farther outside thereof at the time of generating the metal vapor such as Ti in a high vacuum vessel 1. High-frequency current is passed through the coil 7 and AC is passed through the divided conductors 5 as well through so that the Ti is heated and melted by the Joule heat caused by the induced current generated in the Ti and the molten Ti 4' is formed. The molten metal Ti 4' is formed while the contact of the side face of the molten Ti 4' with the conductors 5 is obviated by the interaction of the electromagnetic field by the AC flowing in the coil 7 and the conductors 5 with the induced current flowing in the molten Ti 4' itself. The surface thereof is heated and evaporated by the electron beam of an electron gun 9, by which a high-purity vapor-deposited Ti film is formed on the glass substrate 10.
JP62237784A 1987-09-22 1987-09-22 Method for evaporating metal element or metal compound Pending JPS6479325A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62237784A JPS6479325A (en) 1987-09-22 1987-09-22 Method for evaporating metal element or metal compound

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62237784A JPS6479325A (en) 1987-09-22 1987-09-22 Method for evaporating metal element or metal compound

Publications (1)

Publication Number Publication Date
JPS6479325A true JPS6479325A (en) 1989-03-24

Family

ID=17020382

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62237784A Pending JPS6479325A (en) 1987-09-22 1987-09-22 Method for evaporating metal element or metal compound

Country Status (1)

Country Link
JP (1) JPS6479325A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6179628B1 (en) 1997-12-25 2001-01-30 Furukawa Electric Co., Ltd. Electric connection box
JP2007189881A (en) * 2006-01-16 2007-07-26 Auto Network Gijutsu Kenkyusho:Kk Electrical connection box

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6179628B1 (en) 1997-12-25 2001-01-30 Furukawa Electric Co., Ltd. Electric connection box
JP2007189881A (en) * 2006-01-16 2007-07-26 Auto Network Gijutsu Kenkyusho:Kk Electrical connection box

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