JPS6479092A - Single crystal pulling up device - Google Patents

Single crystal pulling up device

Info

Publication number
JPS6479092A
JPS6479092A JP23612787A JP23612787A JPS6479092A JP S6479092 A JPS6479092 A JP S6479092A JP 23612787 A JP23612787 A JP 23612787A JP 23612787 A JP23612787 A JP 23612787A JP S6479092 A JPS6479092 A JP S6479092A
Authority
JP
Japan
Prior art keywords
single crystal
crucible
melt
crystal
temp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23612787A
Other languages
Japanese (ja)
Inventor
Michio Hori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP23612787A priority Critical patent/JPS6479092A/en
Publication of JPS6479092A publication Critical patent/JPS6479092A/en
Pending legal-status Critical Current

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  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE:To enable local temp. control and to more uniformly uniformize a single crystal with a device for pulling up the single crystal by a CZ method from a raw material melt and growing the single crystal by providing a heat insulating means between a crucible and a heating means for heating the melt. CONSTITUTION:The concentrical crucible 14 and a heater 15 are provided in a pressure vessel 16 and the concentrical heat insulating material 17 is disposed between the crucible 14 and the heater 15. The heat insulating material 17 is constituted in such a manner that said material can be freely vertically moved by means of a motor 19 via a hollow revolving shaft 14. The melt 13 of the crystal raw material is housed in the crucible 14 and is kept at a prescribed temp. by the heater 15 to pull up and grow the single crystal 9 by a pulling up shaft 2 provided with a seed crystal 1 at the front end. The temp. control to provide an arbitrary temp. gradient locally to the melt 13, the growth region of the single crystal 9 and the crystal cooling zone is thereby executed in the pulling-up process of the single crystal 9.
JP23612787A 1987-09-22 1987-09-22 Single crystal pulling up device Pending JPS6479092A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23612787A JPS6479092A (en) 1987-09-22 1987-09-22 Single crystal pulling up device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23612787A JPS6479092A (en) 1987-09-22 1987-09-22 Single crystal pulling up device

Publications (1)

Publication Number Publication Date
JPS6479092A true JPS6479092A (en) 1989-03-24

Family

ID=16996154

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23612787A Pending JPS6479092A (en) 1987-09-22 1987-09-22 Single crystal pulling up device

Country Status (1)

Country Link
JP (1) JPS6479092A (en)

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