CN208219010U - A kind of pulling single crystal furnace apparatus - Google Patents
A kind of pulling single crystal furnace apparatus Download PDFInfo
- Publication number
- CN208219010U CN208219010U CN201820678937.8U CN201820678937U CN208219010U CN 208219010 U CN208219010 U CN 208219010U CN 201820678937 U CN201820678937 U CN 201820678937U CN 208219010 U CN208219010 U CN 208219010U
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- Prior art keywords
- furnace body
- crucible
- single crystal
- shell
- furnace
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- 239000013078 crystal Substances 0.000 title claims abstract description 21
- 238000004321 preservation Methods 0.000 claims abstract description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 abstract description 5
- 230000000694 effects Effects 0.000 abstract description 3
- 239000000463 material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000306 component Substances 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 229910052571 earthenware Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000010257 thawing Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model relates to boule growth fields, more particularly to a kind of pulling single crystal furnace apparatus, including shell and it is located at the intracorporal furnace body of the shell, heat preservation asbestic blanket is equipped between the furnace body and shell, collet is equipped in the furnace body, crucible is equipped on the collet, being placed in the crucible is seed rod, the upper end of the seed rod is connected to lead screw motor, Elema is symmetrically arranged in the furnace body of the crucible two sides, it further include PLC control system, the PLC control system is connect with the lead screw motor and Elema.A kind of pulling single crystal furnace apparatus of the utility model, using being symmetrically arranged in the furnace body of the crucible two sides Elema and realize that temperature being precisely controlled by PLC, to further ensure that temperature in critical field, thermocouple is additionally provided in the furnace body to be monitored, it is compact-sized, heating effect is good, meets crystal growth environment.
Description
Technical field
The utility model relates to boule growth fields, and in particular to a kind of pulling single crystal furnace apparatus.
Background technique
Monocrystalline silicon is generally used for manufacture integrated circuit and other electronic components as a kind of semiconductor material.It is most
Semiconductor grade monocrystalline silicon is manufactured using vertical pulling method, and czochralski crystal growing furnace is using heater by the thawing of the polycrystalline materials such as polysilicon, and
Using the equipment of Grown by CZ Method dislocation-free single crystal.Heater is the core component of thermal field of single crystal furnace, provides polycrystalline and melts long crystalline substance
Thermal energy.Structure is complicated for the heater assembly being laid out in the pulling of crystals furnace structure of the prior art, and it is uneven existing to there is heating
As that can be led to the problem of to the growth of crystal bad.
Summary of the invention
The utility model in order to overcome the deficiencies of the prior art, and compact-sized and homogeneous heating the lifting list of one kind provided
Brilliant furnace apparatus.
In order to solve the above technical problems, the utility model uses following technical scheme:
A kind of pulling single crystal furnace apparatus, including shell and it is located at the intracorporal furnace body of the shell, between the furnace body and shell
Equipped with heat preservation asbestic blanket, it is equipped with collet in the furnace body, crucible is equipped on the collet, being placed in the crucible is seed
The upper end of crystalline style, the seed rod is connected to lead screw motor, is symmetrically arranged with Elema in the furnace body of the crucible two sides, also wraps
PLC control system is included, the PLC control system is connect with the lead screw motor and Elema.
Preferably, thermocouple is additionally provided in the furnace body.
Compared with prior art, the utility model has the following beneficial effects:
A kind of pulling single crystal furnace apparatus of the utility model is symmetrically arranged with Elema using in the furnace body of the crucible two sides
And being precisely controlled for temperature is realized by PLC, to further ensure that temperature in critical field, is additionally provided in the furnace body
Thermocouple is monitored；Utility model device is compact-sized, and heating effect is good, meets crystal growth environment.
Detailed description of the invention
Fig. 1 is the utility model schematic view of the front view.
Specific embodiment
With reference to the accompanying drawings and detailed description to the further details of explanation of the utility model: referring to Fig. 1, to solve
Above-mentioned technical problem, the utility model use following technical scheme:
A kind of pulling single crystal furnace apparatus, including shell 1 and the furnace body 2 being located in the shell 1, the furnace body 2 and shell 1
Between be equipped with heat preservation asbestic blanket 3, in the furnace body 2 be equipped with collet 4, on the collet 4 be equipped with crucible 5, be placed in the earthenware
In crucible 5 is seed rod 6, and the upper end of the seed rod 6 is connected to lead screw motor, symmetrical in the furnace body 2 of 5 two sides of crucible
It further include PLC control system equipped with Elema 7, the PLC control system is connect with the lead screw motor and Elema 7.
Preferably, thermocouple 8 is additionally provided in the furnace body 2.
A kind of pulling single crystal furnace apparatus of the utility model, crystal growth carry out in the crucible 5 of utility model device, lead to
After in advance in PLC control system typing temperature parameter and the revolving speed of lead screw motor, the silicon in the case where PLC control system accurately controls
Carbon-point 7 is begun to warm up, and the crystal material in crucible 5 is melted, the rotary pulling under the driving of lead screw motor of seed rod 6, if
Thermocouple 8 in the furnace body 2 can monitor in-furnace temperature parameter in real time, and feed back to Elema by PLC control system
7.Utility model device is compact-sized, and heating effect is good, meets crystal growth environment.
The above is only the preferred embodiment to the utility model, is not that other shapes are done to the utility model
The limitation of formula, any person skilled in the art are changed or are modified as possibly also with the technology contents of the disclosure above
With the equivalent embodiment of variation.But it is all without departing from the utility model content, according to the technical essence of the utility model
Any simple modification, equivalent change and modification made to the above embodiment still fall within the protection scope of the utility model.
Claims (2)
1. a kind of pulling single crystal furnace apparatus, including shell and be located at the intracorporal furnace body of the shell, it is characterised in that: the furnace body with
It is equipped with heat preservation asbestic blanket between shell, collet is equipped in the furnace body, crucible is equipped on the collet, is placed in the crucible
Interior is seed rod, and the upper end of the seed rod is connected to lead screw motor, is symmetrically arranged with silicon in the furnace body of the crucible two sides
Carbon-point further includes PLC control system, and the PLC control system is connect with the lead screw motor and Elema.
2. a kind of pulling single crystal furnace apparatus according to claim 1, it is characterised in that: be additionally provided with heat in the furnace body
Galvanic couple.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820678937.8U CN208219010U (en) | 2018-05-08 | 2018-05-08 | A kind of pulling single crystal furnace apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820678937.8U CN208219010U (en) | 2018-05-08 | 2018-05-08 | A kind of pulling single crystal furnace apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208219010U true CN208219010U (en) | 2018-12-11 |
Family
ID=64511057
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820678937.8U Active CN208219010U (en) | 2018-05-08 | 2018-05-08 | A kind of pulling single crystal furnace apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208219010U (en) |
-
2018
- 2018-05-08 CN CN201820678937.8U patent/CN208219010U/en active Active
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: A single crystal pulling furnace device Granted publication date: 20181211 Pledgee: China Co. truction Bank Corp Hefei economic and Technological Development Zone Branch Pledgor: ANHUI KERUI SICHUANG CRYSTAL MATERIAL Co.,Ltd. Registration number: Y2024980008319 |