JPS647612A - Laser annealing device - Google Patents

Laser annealing device

Info

Publication number
JPS647612A
JPS647612A JP62161213A JP16121387A JPS647612A JP S647612 A JPS647612 A JP S647612A JP 62161213 A JP62161213 A JP 62161213A JP 16121387 A JP16121387 A JP 16121387A JP S647612 A JPS647612 A JP S647612A
Authority
JP
Japan
Prior art keywords
sample
laser
working
wavelength
illumination light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62161213A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0230798B2 (enrdf_load_html_response
Inventor
Atsushi Ogura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP62161213A priority Critical patent/JPS647612A/ja
Publication of JPS647612A publication Critical patent/JPS647612A/ja
Publication of JPH0230798B2 publication Critical patent/JPH0230798B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Laser Beam Processing (AREA)
  • Recrystallisation Techniques (AREA)
JP62161213A 1987-06-30 1987-06-30 Laser annealing device Granted JPS647612A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62161213A JPS647612A (en) 1987-06-30 1987-06-30 Laser annealing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62161213A JPS647612A (en) 1987-06-30 1987-06-30 Laser annealing device

Publications (2)

Publication Number Publication Date
JPS647612A true JPS647612A (en) 1989-01-11
JPH0230798B2 JPH0230798B2 (enrdf_load_html_response) 1990-07-09

Family

ID=15730760

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62161213A Granted JPS647612A (en) 1987-06-30 1987-06-30 Laser annealing device

Country Status (1)

Country Link
JP (1) JPS647612A (enrdf_load_html_response)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008211136A (ja) * 2007-02-28 2008-09-11 Sumitomo Heavy Ind Ltd レーザアニール装置及びアニール方法
JP2012216733A (ja) * 2011-04-01 2012-11-08 Japan Steel Works Ltd:The レーザ処理プロセスの温度測定装置および温度測定方法
JP2022082420A (ja) * 2020-11-20 2022-06-01 ザ・ボーイング・カンパニー 光学補正を用いるレーザに基づいた製造

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008211136A (ja) * 2007-02-28 2008-09-11 Sumitomo Heavy Ind Ltd レーザアニール装置及びアニール方法
JP2012216733A (ja) * 2011-04-01 2012-11-08 Japan Steel Works Ltd:The レーザ処理プロセスの温度測定装置および温度測定方法
JP2022082420A (ja) * 2020-11-20 2022-06-01 ザ・ボーイング・カンパニー 光学補正を用いるレーザに基づいた製造

Also Published As

Publication number Publication date
JPH0230798B2 (enrdf_load_html_response) 1990-07-09

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term