JPS5332497A - Machining apparatus in use of laser beam - Google Patents

Machining apparatus in use of laser beam

Info

Publication number
JPS5332497A
JPS5332497A JP10629776A JP10629776A JPS5332497A JP S5332497 A JPS5332497 A JP S5332497A JP 10629776 A JP10629776 A JP 10629776A JP 10629776 A JP10629776 A JP 10629776A JP S5332497 A JPS5332497 A JP S5332497A
Authority
JP
Japan
Prior art keywords
laser beam
machining apparatus
reflector mirror
obsevation
diverging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10629776A
Other languages
Japanese (ja)
Inventor
Taisuke Shimoi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP10629776A priority Critical patent/JPS5332497A/en
Publication of JPS5332497A publication Critical patent/JPS5332497A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To provide a machining apparatus in use of laser beam, there is provided a reflector mirror for diverging the laser beam after it is reflected by the reflector mirror, whereby it is enabled to incorporated an optical obsevation system, without the need of moving the article to be machined away from the focal point of a focusing lens.
JP10629776A 1976-09-07 1976-09-07 Machining apparatus in use of laser beam Pending JPS5332497A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10629776A JPS5332497A (en) 1976-09-07 1976-09-07 Machining apparatus in use of laser beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10629776A JPS5332497A (en) 1976-09-07 1976-09-07 Machining apparatus in use of laser beam

Publications (1)

Publication Number Publication Date
JPS5332497A true JPS5332497A (en) 1978-03-27

Family

ID=14430089

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10629776A Pending JPS5332497A (en) 1976-09-07 1976-09-07 Machining apparatus in use of laser beam

Country Status (1)

Country Link
JP (1) JPS5332497A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4661679A (en) * 1985-06-28 1987-04-28 Eaton Corporation Semiconductor laser processing with mirror mask

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4661679A (en) * 1985-06-28 1987-04-28 Eaton Corporation Semiconductor laser processing with mirror mask

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