JPS6475935A - Quantitative measurement in surface analysis and standard specimen therefor - Google Patents
Quantitative measurement in surface analysis and standard specimen thereforInfo
- Publication number
- JPS6475935A JPS6475935A JP62233576A JP23357687A JPS6475935A JP S6475935 A JPS6475935 A JP S6475935A JP 62233576 A JP62233576 A JP 62233576A JP 23357687 A JP23357687 A JP 23357687A JP S6475935 A JPS6475935 A JP S6475935A
- Authority
- JP
- Japan
- Prior art keywords
- concn
- specimen
- measured value
- area ratio
- exposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005259 measurement Methods 0.000 title abstract 4
- 238000005211 surface analysis Methods 0.000 title 1
- 239000011248 coating agent Substances 0.000 abstract 2
- 238000000576 coating method Methods 0.000 abstract 2
- 238000001514 detection method Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Sampling And Sample Adjustment (AREA)
- Electron Tubes For Measurement (AREA)
Abstract
PURPOSE:To enhance accuracy, by measuring the concn. of each element from the surface area ratio of the element alone in the detecting region formed to a detection surface in an exposed state and detecting the concn. of an unknown specimen from the measured value of a standard specimen and the actual measured value of the unknown specimen. CONSTITUTION:The title specimen 9 is constituted of a substrate 1, a coating film 2 of an element A and pattern parts 3-6 and the exposed parts 31 of an element-B bonding part and the exposed part 32 of an element-A coating film bonding part are formed to the pattern parts 3-6. The area ratio of the exposed parts 31, 32 is preliminarily calculated. When measurement is performed using the specimen 9, the area ratio of the elements A, B appears as a concn. ratio as it is and, when the pattern corresponding to the concn. to be calculated is selected to perform measurement, the measured value of the concn. ratio of the elements A, B can be calculated. Therefore, the error of the measured value becomes only the measuring error of the area ratio and measurement can be performed with good accuracy.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62233576A JPH0733987B2 (en) | 1987-09-17 | 1987-09-17 | Quantitative measurement method in surface analysis and standard sample for quantitative measurement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62233576A JPH0733987B2 (en) | 1987-09-17 | 1987-09-17 | Quantitative measurement method in surface analysis and standard sample for quantitative measurement |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6475935A true JPS6475935A (en) | 1989-03-22 |
| JPH0733987B2 JPH0733987B2 (en) | 1995-04-12 |
Family
ID=16957234
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62233576A Expired - Lifetime JPH0733987B2 (en) | 1987-09-17 | 1987-09-17 | Quantitative measurement method in surface analysis and standard sample for quantitative measurement |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0733987B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007078679A (en) * | 2005-08-16 | 2007-03-29 | National Institute Of Advanced Industrial & Technology | Standard specimen for probe geometry evaluation |
| JP2007311444A (en) * | 2006-05-17 | 2007-11-29 | Keio Gijuku | Ion radiation effect evaluation method, process simulator, and device simulator |
-
1987
- 1987-09-17 JP JP62233576A patent/JPH0733987B2/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007078679A (en) * | 2005-08-16 | 2007-03-29 | National Institute Of Advanced Industrial & Technology | Standard specimen for probe geometry evaluation |
| JP2007311444A (en) * | 2006-05-17 | 2007-11-29 | Keio Gijuku | Ion radiation effect evaluation method, process simulator, and device simulator |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0733987B2 (en) | 1995-04-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term | ||
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080412 Year of fee payment: 13 |