JPS6475935A - Quantitative measurement in surface analysis and standard specimen therefor - Google Patents

Quantitative measurement in surface analysis and standard specimen therefor

Info

Publication number
JPS6475935A
JPS6475935A JP62233576A JP23357687A JPS6475935A JP S6475935 A JPS6475935 A JP S6475935A JP 62233576 A JP62233576 A JP 62233576A JP 23357687 A JP23357687 A JP 23357687A JP S6475935 A JPS6475935 A JP S6475935A
Authority
JP
Japan
Prior art keywords
concn
specimen
measured value
area ratio
exposed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62233576A
Other languages
Japanese (ja)
Other versions
JPH0733987B2 (en
Inventor
Yoshiro Shiokawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anelva Corp filed Critical Anelva Corp
Priority to JP62233576A priority Critical patent/JPH0733987B2/en
Publication of JPS6475935A publication Critical patent/JPS6475935A/en
Publication of JPH0733987B2 publication Critical patent/JPH0733987B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

PURPOSE:To enhance accuracy, by measuring the concn. of each element from the surface area ratio of the element alone in the detecting region formed to a detection surface in an exposed state and detecting the concn. of an unknown specimen from the measured value of a standard specimen and the actual measured value of the unknown specimen. CONSTITUTION:The title specimen 9 is constituted of a substrate 1, a coating film 2 of an element A and pattern parts 3-6 and the exposed parts 31 of an element-B bonding part and the exposed part 32 of an element-A coating film bonding part are formed to the pattern parts 3-6. The area ratio of the exposed parts 31, 32 is preliminarily calculated. When measurement is performed using the specimen 9, the area ratio of the elements A, B appears as a concn. ratio as it is and, when the pattern corresponding to the concn. to be calculated is selected to perform measurement, the measured value of the concn. ratio of the elements A, B can be calculated. Therefore, the error of the measured value becomes only the measuring error of the area ratio and measurement can be performed with good accuracy.
JP62233576A 1987-09-17 1987-09-17 Quantitative measurement method in surface analysis and standard sample for quantitative measurement Expired - Lifetime JPH0733987B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62233576A JPH0733987B2 (en) 1987-09-17 1987-09-17 Quantitative measurement method in surface analysis and standard sample for quantitative measurement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62233576A JPH0733987B2 (en) 1987-09-17 1987-09-17 Quantitative measurement method in surface analysis and standard sample for quantitative measurement

Publications (2)

Publication Number Publication Date
JPS6475935A true JPS6475935A (en) 1989-03-22
JPH0733987B2 JPH0733987B2 (en) 1995-04-12

Family

ID=16957234

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62233576A Expired - Lifetime JPH0733987B2 (en) 1987-09-17 1987-09-17 Quantitative measurement method in surface analysis and standard sample for quantitative measurement

Country Status (1)

Country Link
JP (1) JPH0733987B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007078679A (en) * 2005-08-16 2007-03-29 National Institute Of Advanced Industrial & Technology Standard specimen for probe geometry evaluation
JP2007311444A (en) * 2006-05-17 2007-11-29 Keio Gijuku Ion radiation effect evaluation method, process simulator, and device simulator

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007078679A (en) * 2005-08-16 2007-03-29 National Institute Of Advanced Industrial & Technology Standard specimen for probe geometry evaluation
JP2007311444A (en) * 2006-05-17 2007-11-29 Keio Gijuku Ion radiation effect evaluation method, process simulator, and device simulator

Also Published As

Publication number Publication date
JPH0733987B2 (en) 1995-04-12

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