JPS6474789A - Semiconductor laser device - Google Patents

Semiconductor laser device

Info

Publication number
JPS6474789A
JPS6474789A JP23312487A JP23312487A JPS6474789A JP S6474789 A JPS6474789 A JP S6474789A JP 23312487 A JP23312487 A JP 23312487A JP 23312487 A JP23312487 A JP 23312487A JP S6474789 A JPS6474789 A JP S6474789A
Authority
JP
Japan
Prior art keywords
semiconductor laser
photodetector
wavelength
oscillation wavelength
diffraction grating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23312487A
Other languages
Japanese (ja)
Inventor
Kuniaki Iwamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP23312487A priority Critical patent/JPS6474789A/en
Publication of JPS6474789A publication Critical patent/JPS6474789A/en
Pending legal-status Critical Current

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  • Semiconductor Lasers (AREA)

Abstract

PURPOSE:To control the oscillation wavelength of a semiconductor laser in accuracy of 2Angstrom or less by operating a temperature control element, to which the semiconductor laser is fused, by using a detecting signal in a monitor photodetecting section composed of a wavelength dispersion element and a photodetector to which a plurality of photodetectors are arranged. CONSTITUTION:The rear output beams of a semiconductor laser 11 are reflected by a diffraction grating 17 on a pedestal 18, and converted into an electric signal by a photodetector 19 to which a plurality of minute photodetectors such as a charge- coupled device are disposed. Since the angles of diffraction differ according to wavelength in the rear output beams of the semiconductor laser 11 reflected by the diffraction grating 17, the position of irradiation on the photodetector 19 is varied in response to the change of the oscillation wavelength of the semiconductor laser 11. Consequently, the temperature of a Peltier element 13 is controlled by the transmission signal of the photodetector 19, thus controlling the oscillation wavelength of the semiconductor laser 11. When the diffraction grating 17 having resolution of 10<5> or more and the photodetector 19 with a detecting element in 100mum or less are used, the oscillation wavelength of the semiconductor laser can be controlled in wavelength accuracy of approximately 2Angstrom or less.
JP23312487A 1987-09-16 1987-09-16 Semiconductor laser device Pending JPS6474789A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23312487A JPS6474789A (en) 1987-09-16 1987-09-16 Semiconductor laser device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23312487A JPS6474789A (en) 1987-09-16 1987-09-16 Semiconductor laser device

Publications (1)

Publication Number Publication Date
JPS6474789A true JPS6474789A (en) 1989-03-20

Family

ID=16950131

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23312487A Pending JPS6474789A (en) 1987-09-16 1987-09-16 Semiconductor laser device

Country Status (1)

Country Link
JP (1) JPS6474789A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05190985A (en) * 1992-01-14 1993-07-30 Fujitsu Ltd Optical semiconductor module
JP2001244544A (en) * 2000-02-22 2001-09-07 Lucent Technol Inc Optical assembly
US8618970B2 (en) 2012-04-13 2013-12-31 Advantest Corp. DA conversion device and electron beam exposure system using the same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05190985A (en) * 1992-01-14 1993-07-30 Fujitsu Ltd Optical semiconductor module
JP2001244544A (en) * 2000-02-22 2001-09-07 Lucent Technol Inc Optical assembly
US8618970B2 (en) 2012-04-13 2013-12-31 Advantest Corp. DA conversion device and electron beam exposure system using the same

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