JPS6474414A - Optical displacement detector - Google Patents

Optical displacement detector

Info

Publication number
JPS6474414A
JPS6474414A JP23175487A JP23175487A JPS6474414A JP S6474414 A JPS6474414 A JP S6474414A JP 23175487 A JP23175487 A JP 23175487A JP 23175487 A JP23175487 A JP 23175487A JP S6474414 A JPS6474414 A JP S6474414A
Authority
JP
Japan
Prior art keywords
origin
grating
subordinate
pattern
light source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP23175487A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0529851B2 (enrdf_load_stackoverflow
Inventor
Soji Ichikawa
Hideki Oka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Mitsutoyo Kiko Co Ltd
Original Assignee
Mitutoyo Corp
Mitsutoyo Kiko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp, Mitsutoyo Kiko Co Ltd filed Critical Mitutoyo Corp
Priority to JP23175487A priority Critical patent/JPS6474414A/ja
Publication of JPS6474414A publication Critical patent/JPS6474414A/ja
Publication of JPH0529851B2 publication Critical patent/JPH0529851B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP23175487A 1987-09-16 1987-09-16 Optical displacement detector Granted JPS6474414A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23175487A JPS6474414A (en) 1987-09-16 1987-09-16 Optical displacement detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23175487A JPS6474414A (en) 1987-09-16 1987-09-16 Optical displacement detector

Publications (2)

Publication Number Publication Date
JPS6474414A true JPS6474414A (en) 1989-03-20
JPH0529851B2 JPH0529851B2 (enrdf_load_stackoverflow) 1993-05-06

Family

ID=16928511

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23175487A Granted JPS6474414A (en) 1987-09-16 1987-09-16 Optical displacement detector

Country Status (1)

Country Link
JP (1) JPS6474414A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0643507U (ja) * 1992-11-10 1994-06-10 株式会社オーディオテクニカ バー検出装置
JP2003004488A (ja) * 2001-06-20 2003-01-08 Harmonic Drive Syst Ind Co Ltd 光学式エンコーダ
EP1360461B1 (en) * 2001-02-14 2008-05-14 Renishaw plc Position determination system
JP2012500981A (ja) * 2008-08-28 2012-01-12 ドクトル・ヨハネス・ハイデンハイン・ゲーエムベーハー 光学式位置測定装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0643507U (ja) * 1992-11-10 1994-06-10 株式会社オーディオテクニカ バー検出装置
EP1360461B1 (en) * 2001-02-14 2008-05-14 Renishaw plc Position determination system
JP2003004488A (ja) * 2001-06-20 2003-01-08 Harmonic Drive Syst Ind Co Ltd 光学式エンコーダ
JP2012500981A (ja) * 2008-08-28 2012-01-12 ドクトル・ヨハネス・ハイデンハイン・ゲーエムベーハー 光学式位置測定装置

Also Published As

Publication number Publication date
JPH0529851B2 (enrdf_load_stackoverflow) 1993-05-06

Similar Documents

Publication Publication Date Title
EP0311144A3 (en) Optical instrument for measuring displacement
AU584046B2 (en) Apparatus for optically scanning an information plane wherein a diffraction grating splits the beam into two sub-beams
DE3563266D1 (en) Displacement measuring apparatus and method
ES8601460A1 (es) Aparato de medicion de desplazamiento para medir el desplazamiento relativo entre dos elementos
ES2025615T3 (es) Instalacion fotoelectrica de medicion.
JPS6474414A (en) Optical displacement detector
DE58904975D1 (de) Winkelmesseinrichtung.
JPS5269378A (en) Magnetic optical photometer
JPS5376047A (en) Light source of optical reader
JPS57114112A (en) Image reader
JPS5342043A (en) Optical multichannel system
GB1525049A (en) Displacement-indicating apparatus
ATE122456T1 (de) Winkelmesseinrichtung.
JPS57211504A (en) Observation member for talbot interferometer
JPS5288042A (en) Production of optical waveguides having more than two kinds of diffrac tion gratings
JPS6489323A (en) Alignment device
DE3679606D1 (de) Positionsmessvorrichtung mit optischen gittern.
JPS6476005A (en) Wavelength multiple optical demultiplexer
JPS64417A (en) Optical encoder
JPS5723906A (en) Broad-band optical branching filter
JPS57169608A (en) Distance measuring method
JPS6482623A (en) Device for alignment
JPS5299842A (en) Measurement of wavelength dispersion
JPS6482624A (en) Device for alignment
JPS56137231A (en) Spectral measurement device

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees