JPS6473771A - Semiconductor integrated circuit - Google Patents

Semiconductor integrated circuit

Info

Publication number
JPS6473771A
JPS6473771A JP62229538A JP22953887A JPS6473771A JP S6473771 A JPS6473771 A JP S6473771A JP 62229538 A JP62229538 A JP 62229538A JP 22953887 A JP22953887 A JP 22953887A JP S6473771 A JPS6473771 A JP S6473771A
Authority
JP
Japan
Prior art keywords
film
layer
insulating film
sio2
laminated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62229538A
Other languages
English (en)
Inventor
Chikashi Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP62229538A priority Critical patent/JPS6473771A/ja
Publication of JPS6473771A publication Critical patent/JPS6473771A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Non-Volatile Memory (AREA)
  • Semiconductor Memories (AREA)
JP62229538A 1987-09-16 1987-09-16 Semiconductor integrated circuit Pending JPS6473771A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62229538A JPS6473771A (en) 1987-09-16 1987-09-16 Semiconductor integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62229538A JPS6473771A (en) 1987-09-16 1987-09-16 Semiconductor integrated circuit

Publications (1)

Publication Number Publication Date
JPS6473771A true JPS6473771A (en) 1989-03-20

Family

ID=16893738

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62229538A Pending JPS6473771A (en) 1987-09-16 1987-09-16 Semiconductor integrated circuit

Country Status (1)

Country Link
JP (1) JPS6473771A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02274732A (ja) * 1989-04-18 1990-11-08 Ube Ind Ltd 珪素含有多環状芳香族重合体並びにその製造方法
US7122858B2 (en) 2003-02-26 2006-10-17 Kabushiki Kaisha Toshiba Nonvolatile semiconductor memory device including improved gate electrode

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02274732A (ja) * 1989-04-18 1990-11-08 Ube Ind Ltd 珪素含有多環状芳香族重合体並びにその製造方法
US7122858B2 (en) 2003-02-26 2006-10-17 Kabushiki Kaisha Toshiba Nonvolatile semiconductor memory device including improved gate electrode
US7298006B2 (en) 2003-02-26 2007-11-20 Kabushiki Kaisha Toshiba Nonvolatile semiconductor memory device including improved gate electrode
US7521749B2 (en) 2003-02-26 2009-04-21 Kabushiki Kaisha Toshiba Nonvolatile semiconductor memory device including improved gate electrode

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