JPS647360B2 - - Google Patents

Info

Publication number
JPS647360B2
JPS647360B2 JP1866280A JP1866280A JPS647360B2 JP S647360 B2 JPS647360 B2 JP S647360B2 JP 1866280 A JP1866280 A JP 1866280A JP 1866280 A JP1866280 A JP 1866280A JP S647360 B2 JPS647360 B2 JP S647360B2
Authority
JP
Japan
Prior art keywords
output
voltage
abnormal discharge
charged particle
particle beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1866280A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56116000A (en
Inventor
Akihiro Mitsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daihen Corp
Original Assignee
Daihen Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daihen Corp filed Critical Daihen Corp
Priority to JP1866280A priority Critical patent/JPS56116000A/ja
Publication of JPS56116000A publication Critical patent/JPS56116000A/ja
Publication of JPS647360B2 publication Critical patent/JPS647360B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP1866280A 1980-02-16 1980-02-16 Charged particle beam machining equipmint Granted JPS56116000A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1866280A JPS56116000A (en) 1980-02-16 1980-02-16 Charged particle beam machining equipmint

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1866280A JPS56116000A (en) 1980-02-16 1980-02-16 Charged particle beam machining equipmint

Publications (2)

Publication Number Publication Date
JPS56116000A JPS56116000A (en) 1981-09-11
JPS647360B2 true JPS647360B2 (sv) 1989-02-08

Family

ID=11977816

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1866280A Granted JPS56116000A (en) 1980-02-16 1980-02-16 Charged particle beam machining equipmint

Country Status (1)

Country Link
JP (1) JPS56116000A (sv)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61206200A (ja) * 1985-03-08 1986-09-12 日新ハイボルテ−ジ株式会社 荷電粒子加速装置の放電検出回路
JPH0619972B2 (ja) * 1985-11-13 1994-03-16 株式会社日立製作所 電子ビ−ム加工機
JP2656542B2 (ja) * 1988-05-23 1997-09-24 株式会社日立製作所 イオンビーム加工装置
JP2848136B2 (ja) * 1992-05-27 1999-01-20 日新ハイボルテージ株式会社 電子線照射装置用制御方式
US6452196B1 (en) * 1999-12-20 2002-09-17 Axcelis Technologies, Inc. Power supply hardening for ion beam systems
JP5857154B2 (ja) * 2013-04-17 2016-02-10 株式会社日立ハイテクノロジーズ 荷電粒子線装置

Also Published As

Publication number Publication date
JPS56116000A (en) 1981-09-11

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