JPS647321B2 - - Google Patents
Info
- Publication number
- JPS647321B2 JPS647321B2 JP16312081A JP16312081A JPS647321B2 JP S647321 B2 JPS647321 B2 JP S647321B2 JP 16312081 A JP16312081 A JP 16312081A JP 16312081 A JP16312081 A JP 16312081A JP S647321 B2 JPS647321 B2 JP S647321B2
- Authority
- JP
- Japan
- Prior art keywords
- optical axis
- displacement
- axis sensor
- photodiodes
- power
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006073 displacement reaction Methods 0.000 claims description 29
- 230000003287 optical effect Effects 0.000 claims description 26
- 238000001514 detection method Methods 0.000 claims description 9
- 230000007423 decrease Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 238000009412 basement excavation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16312081A JPS5863801A (ja) | 1981-10-13 | 1981-10-13 | 変位検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16312081A JPS5863801A (ja) | 1981-10-13 | 1981-10-13 | 変位検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5863801A JPS5863801A (ja) | 1983-04-15 |
| JPS647321B2 true JPS647321B2 (enExample) | 1989-02-08 |
Family
ID=15767552
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16312081A Granted JPS5863801A (ja) | 1981-10-13 | 1981-10-13 | 変位検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5863801A (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6038606A (ja) * | 1983-08-11 | 1985-02-28 | Olympus Optical Co Ltd | 光学式寸度測定装置 |
| JPH06103193B2 (ja) * | 1988-10-05 | 1994-12-14 | 株式会社ミツトヨ | 光電型エンコーダ |
| IT1229387B (it) * | 1989-05-30 | 1991-08-08 | Pirelli Cavi Spa | Metodo e sensore ottico per la determinazione della posizione di un corpo mobile. |
| CN116858107B (zh) * | 2023-08-17 | 2024-11-05 | 中国船舶科学研究中心 | 一种激光位移传感器的并行测量方法 |
-
1981
- 1981-10-13 JP JP16312081A patent/JPS5863801A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5863801A (ja) | 1983-04-15 |
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