JPS6467916A - Resist discharge nozzle - Google Patents

Resist discharge nozzle

Info

Publication number
JPS6467916A
JPS6467916A JP22487187A JP22487187A JPS6467916A JP S6467916 A JPS6467916 A JP S6467916A JP 22487187 A JP22487187 A JP 22487187A JP 22487187 A JP22487187 A JP 22487187A JP S6467916 A JPS6467916 A JP S6467916A
Authority
JP
Japan
Prior art keywords
resist
nozzle tip
outside diameter
nozzle
droplets
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22487187A
Other languages
Japanese (ja)
Other versions
JPH081886B2 (en
Inventor
Katsushige Ninomiya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP62224871A priority Critical patent/JPH081886B2/en
Publication of JPS6467916A publication Critical patent/JPS6467916A/en
Publication of JPH081886B2 publication Critical patent/JPH081886B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE:To reduce the remainder of a resist at the surface of a nozzle tip so as to decrease the coating unevenness of the resist and further, improve a yield rate, by making the thickness of the nozzle tip surface thin. CONSTITUTION:The mainframe 7 of a nozzle is a stepped cylindrical tubing where the outside diameter of its tip is made small and is composed of a large tube part 7a having its outside diameter 3mm, a small tube part 7b having its outside diameter 2.5mm, having each inner diameter 1.5mm. Further, a resist discharge port, that is, the surface 7c of a nozzle tip is formed into a smooth plane. As a result, the amount of a resist remaining at the surface 7c of the nozzle tip after discharging the resist decreases and then, mixing of its resist into droplets of the resist having high viscosity in the next operation decreases. Accordingly, this arrangement allows viscosity distribution in the droplets of the resist to be kept constant and makes dispersion of the resist uniform on a semiconductor wafer, resulting in the reduced coating unevenness of the resist. Further, this approach prevents lowering of a yield rate due to dust that adheres to the residual resist.
JP62224871A 1987-09-08 1987-09-08 Resist discharge nozzle Expired - Lifetime JPH081886B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62224871A JPH081886B2 (en) 1987-09-08 1987-09-08 Resist discharge nozzle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62224871A JPH081886B2 (en) 1987-09-08 1987-09-08 Resist discharge nozzle

Publications (2)

Publication Number Publication Date
JPS6467916A true JPS6467916A (en) 1989-03-14
JPH081886B2 JPH081886B2 (en) 1996-01-10

Family

ID=16820475

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62224871A Expired - Lifetime JPH081886B2 (en) 1987-09-08 1987-09-08 Resist discharge nozzle

Country Status (1)

Country Link
JP (1) JPH081886B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009078023A (en) * 2007-09-27 2009-04-16 Nipro Corp Syringe
JP2013155442A (en) * 2012-01-26 2013-08-15 Gunze Ltd Resin agent coating device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4482290B2 (en) * 2003-06-11 2010-06-16 矢崎総業株式会社 Coloring nozzle for electric wires

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56155444U (en) * 1980-04-21 1981-11-20
JPS5988828A (en) * 1982-11-12 1984-05-22 Matsushita Electric Ind Co Ltd Cleaning device
JPS5978631U (en) * 1982-11-19 1984-05-28 株式会社東芝 Photoresist coating equipment
JPS59171336U (en) * 1983-04-30 1984-11-16 株式会社東芝 resist dripping nozzle
JPS61180439A (en) * 1985-02-06 1986-08-13 Toshiba Corp Discharge nozzle for photo resist

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56155444U (en) * 1980-04-21 1981-11-20
JPS5988828A (en) * 1982-11-12 1984-05-22 Matsushita Electric Ind Co Ltd Cleaning device
JPS5978631U (en) * 1982-11-19 1984-05-28 株式会社東芝 Photoresist coating equipment
JPS59171336U (en) * 1983-04-30 1984-11-16 株式会社東芝 resist dripping nozzle
JPS61180439A (en) * 1985-02-06 1986-08-13 Toshiba Corp Discharge nozzle for photo resist

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009078023A (en) * 2007-09-27 2009-04-16 Nipro Corp Syringe
JP2013155442A (en) * 2012-01-26 2013-08-15 Gunze Ltd Resin agent coating device

Also Published As

Publication number Publication date
JPH081886B2 (en) 1996-01-10

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