JPS6462484A - Method for flattening diamond film - Google Patents
Method for flattening diamond filmInfo
- Publication number
- JPS6462484A JPS6462484A JP22005287A JP22005287A JPS6462484A JP S6462484 A JPS6462484 A JP S6462484A JP 22005287 A JP22005287 A JP 22005287A JP 22005287 A JP22005287 A JP 22005287A JP S6462484 A JPS6462484 A JP S6462484A
- Authority
- JP
- Japan
- Prior art keywords
- diamond film
- flattening
- flattened
- synthesized
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To remarkably improve the flatness of a diamond film having high crystallinity by flattening the surface of a flattening layer formed on the diamond film and etching the flattened surface. CONSTITUTION:A diamond film 2 having high crystallinity is synthesized on a substrate 1. A flattening layer such as an amorphous carbon film 3 is synthesized on the diamond film 2 and the surface of the layer is flattened. The flattened surface is then etched, e.g., by generating hydrogen plasma. Thus, a high quality diamond film having very high flatness is obtd.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22005287A JPS6462484A (en) | 1987-09-02 | 1987-09-02 | Method for flattening diamond film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22005287A JPS6462484A (en) | 1987-09-02 | 1987-09-02 | Method for flattening diamond film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6462484A true JPS6462484A (en) | 1989-03-08 |
Family
ID=16745172
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP22005287A Pending JPS6462484A (en) | 1987-09-02 | 1987-09-02 | Method for flattening diamond film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6462484A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2253416A (en) * | 1991-02-21 | 1992-09-09 | De Beers Ind Diamond | Radiation absorber comprising a CVD diamond film having special surface characteristics |
EP0615004A1 (en) * | 1993-03-10 | 1994-09-14 | Sumitomo Electric Industries, Limited | Method of polishing/flattening diamond |
EP0741118A3 (en) * | 1995-05-05 | 1997-05-07 | Saint Gobain Norton Ind Cerami | Method of synthetic diamond ablation with an oxygen plasma and synthetic diamonds etched accordingly |
US5939149A (en) * | 1995-11-02 | 1999-08-17 | Orion Electric Co., Ltd. | Method of forming hydrogen-free diamond like carbon (DLC) films |
-
1987
- 1987-09-02 JP JP22005287A patent/JPS6462484A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2253416A (en) * | 1991-02-21 | 1992-09-09 | De Beers Ind Diamond | Radiation absorber comprising a CVD diamond film having special surface characteristics |
EP0615004A1 (en) * | 1993-03-10 | 1994-09-14 | Sumitomo Electric Industries, Limited | Method of polishing/flattening diamond |
US5500077A (en) * | 1993-03-10 | 1996-03-19 | Sumitomo Electric Industries, Ltd. | Method of polishing/flattening diamond |
EP0741118A3 (en) * | 1995-05-05 | 1997-05-07 | Saint Gobain Norton Ind Cerami | Method of synthetic diamond ablation with an oxygen plasma and synthetic diamonds etched accordingly |
US5939149A (en) * | 1995-11-02 | 1999-08-17 | Orion Electric Co., Ltd. | Method of forming hydrogen-free diamond like carbon (DLC) films |
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