JPS6461602A - Surface shape measuring instrument - Google Patents

Surface shape measuring instrument

Info

Publication number
JPS6461602A
JPS6461602A JP21878787A JP21878787A JPS6461602A JP S6461602 A JPS6461602 A JP S6461602A JP 21878787 A JP21878787 A JP 21878787A JP 21878787 A JP21878787 A JP 21878787A JP S6461602 A JPS6461602 A JP S6461602A
Authority
JP
Japan
Prior art keywords
mirror
reflected
measure
measured
surface shape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP21878787A
Other languages
English (en)
Inventor
Masakazu Matsugi
Masanori Hasegawa
Minoru Yoshii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP21878787A priority Critical patent/JPS6461602A/ja
Publication of JPS6461602A publication Critical patent/JPS6461602A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP21878787A 1987-08-31 1987-08-31 Surface shape measuring instrument Pending JPS6461602A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21878787A JPS6461602A (en) 1987-08-31 1987-08-31 Surface shape measuring instrument

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21878787A JPS6461602A (en) 1987-08-31 1987-08-31 Surface shape measuring instrument

Publications (1)

Publication Number Publication Date
JPS6461602A true JPS6461602A (en) 1989-03-08

Family

ID=16725368

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21878787A Pending JPS6461602A (en) 1987-08-31 1987-08-31 Surface shape measuring instrument

Country Status (1)

Country Link
JP (1) JPS6461602A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006179705A (ja) * 2004-12-22 2006-07-06 Kokusai Electric Semiconductor Service Inc 基板の素子形状判定方法、基板の素子形状判定装置及び半導体製造プロセスにおける基板の素子形状判定システム
CN107121092A (zh) * 2017-05-24 2017-09-01 西安交通大学 一种激光干涉检测轴承滚珠面型误差的系统及方法
US11977035B2 (en) 2019-04-08 2024-05-07 Hitachi High-Tech Corporation Surface shape detection device and detection method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60222704A (ja) * 1984-04-19 1985-11-07 Ricoh Co Ltd 表面形状測定装置
JPS61253405A (ja) * 1985-05-02 1986-11-11 Ricoh Co Ltd シアリング干渉測定方式におけるシア量測定方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60222704A (ja) * 1984-04-19 1985-11-07 Ricoh Co Ltd 表面形状測定装置
JPS61253405A (ja) * 1985-05-02 1986-11-11 Ricoh Co Ltd シアリング干渉測定方式におけるシア量測定方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006179705A (ja) * 2004-12-22 2006-07-06 Kokusai Electric Semiconductor Service Inc 基板の素子形状判定方法、基板の素子形状判定装置及び半導体製造プロセスにおける基板の素子形状判定システム
CN107121092A (zh) * 2017-05-24 2017-09-01 西安交通大学 一种激光干涉检测轴承滚珠面型误差的系统及方法
US11977035B2 (en) 2019-04-08 2024-05-07 Hitachi High-Tech Corporation Surface shape detection device and detection method

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