JPS6459872A - Manufacture of semiconductor pressure sensor - Google Patents
Manufacture of semiconductor pressure sensorInfo
- Publication number
- JPS6459872A JPS6459872A JP21699687A JP21699687A JPS6459872A JP S6459872 A JPS6459872 A JP S6459872A JP 21699687 A JP21699687 A JP 21699687A JP 21699687 A JP21699687 A JP 21699687A JP S6459872 A JPS6459872 A JP S6459872A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor chip
- grinding stone
- center
- peripheral
- pressure sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Abstract
PURPOSE:To make the thickness of the deforming part of a diaphragm uniform from a center part to a peripheral part to obtain a high sensitive semiconductor pressure sensor, by improving a configuration of a grinding stone of machining to a semiconductor chip and using this together with etching. CONSTITUTION:A cylindrical grinding stone 25 is pressed to one surface of a semiconductor chip 26 by revolving to form a recessed part 27 by ultrasonic grinding processing. The bottom configuration of the grinding stone 25 is formed in a conical surface which becomes deeper from its peripheral toward its central axis. Therefore, if a semiconductor chip 26 is processed by such grinding stone 25, a deforming part 28 which is thick in its center and thin in its peripheral section is formed. The semiconductor chip 26 having such recessed part is dipped in etchant and isotropic etching is performed by applying a current through an electrode 29 to form a diaphragm 31 having a deforming part 30 whose thickness is uniform ranging from the center to the peripheral section.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21699687A JPS6459872A (en) | 1987-08-31 | 1987-08-31 | Manufacture of semiconductor pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21699687A JPS6459872A (en) | 1987-08-31 | 1987-08-31 | Manufacture of semiconductor pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6459872A true JPS6459872A (en) | 1989-03-07 |
Family
ID=16697180
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21699687A Pending JPS6459872A (en) | 1987-08-31 | 1987-08-31 | Manufacture of semiconductor pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6459872A (en) |
-
1987
- 1987-08-31 JP JP21699687A patent/JPS6459872A/en active Pending
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