JPS6457632A - Double contact probe device - Google Patents

Double contact probe device

Info

Publication number
JPS6457632A
JPS6457632A JP21455687A JP21455687A JPS6457632A JP S6457632 A JPS6457632 A JP S6457632A JP 21455687 A JP21455687 A JP 21455687A JP 21455687 A JP21455687 A JP 21455687A JP S6457632 A JPS6457632 A JP S6457632A
Authority
JP
Japan
Prior art keywords
probe
checked
contact
pin
pins
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21455687A
Other languages
Japanese (ja)
Other versions
JPH0727938B2 (en
Inventor
Takuo Uchida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP62214556A priority Critical patent/JPH0727938B2/en
Publication of JPS6457632A publication Critical patent/JPS6457632A/en
Publication of JPH0727938B2 publication Critical patent/JPH0727938B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To enable using two kinds of probe pins by the same device without removing the pins, by providing a first probe pin coming into contact with the electrode of a body to be checked, at a first position in the direction of height, and a second probe pin coming into contact with the electrode of the body to be checked, at a second position lower than the first position. CONSTITUTION:A probe device checking electric characteristics of a body 1 to be checked by bringing probe pins into contact with electrodes of the body 1 to be checked is provided with first probe pins 21 and a second probe pin 31. The former comes into contact with electrodes of the body 1 to be checked at a first position L1 in the direction of height. The latter comes into contact with the above-mentioned body 1 to be checked at a second position L2 lower than the first position L1. For example, a plurality of the first probe pins 21 are fixed on a probe card 20 so as to come into contact with the respective electrodes arranged at specified intervals on the body 1 to be checked. The second probe pin 31 is constituted as a coaxial pin capable of measuring very small current of the body 1 to be checked. At the time of checking by using the first probe pins 21, the second probe 31 can be moved upward higher than the first position L1 so as to evade the first pin.
JP62214556A 1987-08-27 1987-08-27 Double contact probe device Expired - Lifetime JPH0727938B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62214556A JPH0727938B2 (en) 1987-08-27 1987-08-27 Double contact probe device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62214556A JPH0727938B2 (en) 1987-08-27 1987-08-27 Double contact probe device

Publications (2)

Publication Number Publication Date
JPS6457632A true JPS6457632A (en) 1989-03-03
JPH0727938B2 JPH0727938B2 (en) 1995-03-29

Family

ID=16657679

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62214556A Expired - Lifetime JPH0727938B2 (en) 1987-08-27 1987-08-27 Double contact probe device

Country Status (1)

Country Link
JP (1) JPH0727938B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04135855A (en) * 1990-09-28 1992-05-11 Toppan Printing Co Ltd Manufacture of floor material
JPH0623250U (en) * 1992-08-24 1994-03-25 日本電信電話株式会社 Micro mover for high frequency probe head
JP2016511410A (en) * 2013-03-13 2016-04-14 エクセラ・コーポレーションＸｃｅｒｒａ Ｃｏｒｐ． Cross member unit of printed circuit board test apparatus and test apparatus having the cross member unit
JP2022169624A (en) * 2017-12-26 2022-11-09 日本電産リード株式会社 Inspection jig

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5711414U (en) * 1980-06-25 1982-01-21
JPS6047433A (en) * 1983-08-25 1985-03-14 Mitsubishi Electric Corp Test equipment for multikind loading wafer
JPS6214691U (en) * 1985-07-09 1987-01-28

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5711414U (en) * 1980-06-25 1982-01-21
JPS6047433A (en) * 1983-08-25 1985-03-14 Mitsubishi Electric Corp Test equipment for multikind loading wafer
JPS6214691U (en) * 1985-07-09 1987-01-28

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04135855A (en) * 1990-09-28 1992-05-11 Toppan Printing Co Ltd Manufacture of floor material
JPH0623250U (en) * 1992-08-24 1994-03-25 日本電信電話株式会社 Micro mover for high frequency probe head
JP2016511410A (en) * 2013-03-13 2016-04-14 エクセラ・コーポレーションＸｃｅｒｒａ Ｃｏｒｐ． Cross member unit of printed circuit board test apparatus and test apparatus having the cross member unit
JP2022169624A (en) * 2017-12-26 2022-11-09 日本電産リード株式会社 Inspection jig

Also Published As

Publication number Publication date
JPH0727938B2 (en) 1995-03-29

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