JPS645744B2 - - Google Patents

Info

Publication number
JPS645744B2
JPS645744B2 JP56209919A JP20991981A JPS645744B2 JP S645744 B2 JPS645744 B2 JP S645744B2 JP 56209919 A JP56209919 A JP 56209919A JP 20991981 A JP20991981 A JP 20991981A JP S645744 B2 JPS645744 B2 JP S645744B2
Authority
JP
Japan
Prior art keywords
axis
sample
adjustment
shaft
coordinate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56209919A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58115740A (ja
Inventor
Shigeru Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Akashi Seisakusho KK
Original Assignee
Akashi Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akashi Seisakusho KK filed Critical Akashi Seisakusho KK
Priority to JP56209919A priority Critical patent/JPS58115740A/ja
Publication of JPS58115740A publication Critical patent/JPS58115740A/ja
Publication of JPS645744B2 publication Critical patent/JPS645744B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP56209919A 1981-12-28 1981-12-28 電子線装置の試料駆動機構 Granted JPS58115740A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56209919A JPS58115740A (ja) 1981-12-28 1981-12-28 電子線装置の試料駆動機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56209919A JPS58115740A (ja) 1981-12-28 1981-12-28 電子線装置の試料駆動機構

Publications (2)

Publication Number Publication Date
JPS58115740A JPS58115740A (ja) 1983-07-09
JPS645744B2 true JPS645744B2 (OSRAM) 1989-01-31

Family

ID=16580830

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56209919A Granted JPS58115740A (ja) 1981-12-28 1981-12-28 電子線装置の試料駆動機構

Country Status (1)

Country Link
JP (1) JPS58115740A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07276003A (ja) * 1994-04-07 1995-10-24 Nippon Steel Corp 双ロール式連続鋳造法における鋳片表層スケール低減方法及び双ロール式連続鋳造装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07276003A (ja) * 1994-04-07 1995-10-24 Nippon Steel Corp 双ロール式連続鋳造法における鋳片表層スケール低減方法及び双ロール式連続鋳造装置

Also Published As

Publication number Publication date
JPS58115740A (ja) 1983-07-09

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