JPS645433U - - Google Patents
Info
- Publication number
- JPS645433U JPS645433U JP10056187U JP10056187U JPS645433U JP S645433 U JPS645433 U JP S645433U JP 10056187 U JP10056187 U JP 10056187U JP 10056187 U JP10056187 U JP 10056187U JP S645433 U JPS645433 U JP S645433U
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- reticle
- optical system
- light source
- supports
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 3
- 239000004973 liquid crystal related substance Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 210000002858 crystal cell Anatomy 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10056187U JPS645433U (en:Method) | 1987-06-29 | 1987-06-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10056187U JPS645433U (en:Method) | 1987-06-29 | 1987-06-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS645433U true JPS645433U (en:Method) | 1989-01-12 |
Family
ID=31328746
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10056187U Pending JPS645433U (en:Method) | 1987-06-29 | 1987-06-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS645433U (en:Method) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6128312A (ja) * | 1984-07-20 | 1986-02-08 | ヤンマー農機株式会社 | 田植機 |
| JPS6214428A (ja) * | 1985-07-12 | 1987-01-23 | Nec Corp | 縮小投影型露光方法 |
| JPS62105130A (ja) * | 1985-10-31 | 1987-05-15 | Nec Corp | 複写機 |
-
1987
- 1987-06-29 JP JP10056187U patent/JPS645433U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6128312A (ja) * | 1984-07-20 | 1986-02-08 | ヤンマー農機株式会社 | 田植機 |
| JPS6214428A (ja) * | 1985-07-12 | 1987-01-23 | Nec Corp | 縮小投影型露光方法 |
| JPS62105130A (ja) * | 1985-10-31 | 1987-05-15 | Nec Corp | 複写機 |