JPS6454255A - Character measurement for abrasive cloth - Google Patents

Character measurement for abrasive cloth

Info

Publication number
JPS6454255A
JPS6454255A JP21119387A JP21119387A JPS6454255A JP S6454255 A JPS6454255 A JP S6454255A JP 21119387 A JP21119387 A JP 21119387A JP 21119387 A JP21119387 A JP 21119387A JP S6454255 A JPS6454255 A JP S6454255A
Authority
JP
Japan
Prior art keywords
indenter
abrasive cloth
strain gauge
vertical
tracing head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP21119387A
Other languages
Japanese (ja)
Inventor
Kazunori Tani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SpeedFam Co Ltd
Original Assignee
SpeedFam Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SpeedFam Co Ltd filed Critical SpeedFam Co Ltd
Priority to JP21119387A priority Critical patent/JPS6454255A/en
Publication of JPS6454255A publication Critical patent/JPS6454255A/en
Pending legal-status Critical Current

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  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

PURPOSE:To enable the feeding of an abrasive cloth in terms of characteristics, by extracting vertical and horizontal reactions working on an indenter placed thereon separately with a sensor to obtain characteristics thereof as objective and reproducible numeral. CONSTITUTION:A tracing head 4 is placed on the top of an abrasive cloth 3 and an indenter 7 is made to abut the top face thereof 3. The tracing head 4 is pressed with a pressurizing member 8 to apply a load on the indenter 7 vertical to the abrasive cloth 3, while a moving base 2 is moved to pull the tracing head 4, namely, the indenter 7 horizontally through a strain gauge 6. Here, a horizontal reaction acting on the indenter 7 is detected with the strain gauge 6 while a vertical reaction is detected with a strain gauge 10 both as electrical signal. Then, after amplified with an amplifier, the signal is digitalized with a computing circuit by a signal processing to outputted on a display device or a printer.
JP21119387A 1987-08-25 1987-08-25 Character measurement for abrasive cloth Pending JPS6454255A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21119387A JPS6454255A (en) 1987-08-25 1987-08-25 Character measurement for abrasive cloth

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21119387A JPS6454255A (en) 1987-08-25 1987-08-25 Character measurement for abrasive cloth

Publications (1)

Publication Number Publication Date
JPS6454255A true JPS6454255A (en) 1989-03-01

Family

ID=16601925

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21119387A Pending JPS6454255A (en) 1987-08-25 1987-08-25 Character measurement for abrasive cloth

Country Status (1)

Country Link
JP (1) JPS6454255A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0772036A3 (en) * 1995-10-31 1998-05-13 Gerold Staudinger Apparatus for testing bonds between an (electric) element and a support provided with conducting tracks

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0772036A3 (en) * 1995-10-31 1998-05-13 Gerold Staudinger Apparatus for testing bonds between an (electric) element and a support provided with conducting tracks

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