JPS6453543A - Gas nozzle - Google Patents

Gas nozzle

Info

Publication number
JPS6453543A
JPS6453543A JP21084887A JP21084887A JPS6453543A JP S6453543 A JPS6453543 A JP S6453543A JP 21084887 A JP21084887 A JP 21084887A JP 21084887 A JP21084887 A JP 21084887A JP S6453543 A JPS6453543 A JP S6453543A
Authority
JP
Japan
Prior art keywords
tube
inside tube
gas
gas jets
jets
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP21084887A
Other languages
English (en)
Inventor
Yoshio Sunaga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP21084887A priority Critical patent/JPS6453543A/ja
Publication of JPS6453543A publication Critical patent/JPS6453543A/ja
Pending legal-status Critical Current

Links

JP21084887A 1987-08-25 1987-08-25 Gas nozzle Pending JPS6453543A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21084887A JPS6453543A (en) 1987-08-25 1987-08-25 Gas nozzle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21084887A JPS6453543A (en) 1987-08-25 1987-08-25 Gas nozzle

Publications (1)

Publication Number Publication Date
JPS6453543A true JPS6453543A (en) 1989-03-01

Family

ID=16596109

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21084887A Pending JPS6453543A (en) 1987-08-25 1987-08-25 Gas nozzle

Country Status (1)

Country Link
JP (1) JPS6453543A (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0472620U (ja) * 1990-11-02 1992-06-26
WO1998028107A1 (en) * 1996-12-23 1998-07-02 Fsi International, Inc. Rotatable and translatable spray nozzle
JP2004018904A (ja) * 2002-06-13 2004-01-22 Sekisui Chem Co Ltd リモート型ガス供給装置
JP2007317745A (ja) * 2006-05-23 2007-12-06 Shimadzu Corp ガス導入装置
JP2008285735A (ja) * 2007-05-21 2008-11-27 Hitachi Kokusai Electric Inc 基板処理装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0472620U (ja) * 1990-11-02 1992-06-26
WO1998028107A1 (en) * 1996-12-23 1998-07-02 Fsi International, Inc. Rotatable and translatable spray nozzle
US5942037A (en) * 1996-12-23 1999-08-24 Fsi International, Inc. Rotatable and translatable spray nozzle
JP2004018904A (ja) * 2002-06-13 2004-01-22 Sekisui Chem Co Ltd リモート型ガス供給装置
JP2007317745A (ja) * 2006-05-23 2007-12-06 Shimadzu Corp ガス導入装置
JP2008285735A (ja) * 2007-05-21 2008-11-27 Hitachi Kokusai Electric Inc 基板処理装置

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