JPS6453543A - Gas nozzle - Google Patents
Gas nozzleInfo
- Publication number
- JPS6453543A JPS6453543A JP21084887A JP21084887A JPS6453543A JP S6453543 A JPS6453543 A JP S6453543A JP 21084887 A JP21084887 A JP 21084887A JP 21084887 A JP21084887 A JP 21084887A JP S6453543 A JPS6453543 A JP S6453543A
- Authority
- JP
- Japan
- Prior art keywords
- tube
- inside tube
- gas
- gas jets
- jets
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21084887A JPS6453543A (en) | 1987-08-25 | 1987-08-25 | Gas nozzle |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21084887A JPS6453543A (en) | 1987-08-25 | 1987-08-25 | Gas nozzle |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6453543A true JPS6453543A (en) | 1989-03-01 |
Family
ID=16596109
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP21084887A Pending JPS6453543A (en) | 1987-08-25 | 1987-08-25 | Gas nozzle |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6453543A (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0472620U (ja) * | 1990-11-02 | 1992-06-26 | ||
WO1998028107A1 (en) * | 1996-12-23 | 1998-07-02 | Fsi International, Inc. | Rotatable and translatable spray nozzle |
JP2004018904A (ja) * | 2002-06-13 | 2004-01-22 | Sekisui Chem Co Ltd | リモート型ガス供給装置 |
JP2007317745A (ja) * | 2006-05-23 | 2007-12-06 | Shimadzu Corp | ガス導入装置 |
JP2008285735A (ja) * | 2007-05-21 | 2008-11-27 | Hitachi Kokusai Electric Inc | 基板処理装置 |
-
1987
- 1987-08-25 JP JP21084887A patent/JPS6453543A/ja active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0472620U (ja) * | 1990-11-02 | 1992-06-26 | ||
WO1998028107A1 (en) * | 1996-12-23 | 1998-07-02 | Fsi International, Inc. | Rotatable and translatable spray nozzle |
US5942037A (en) * | 1996-12-23 | 1999-08-24 | Fsi International, Inc. | Rotatable and translatable spray nozzle |
JP2004018904A (ja) * | 2002-06-13 | 2004-01-22 | Sekisui Chem Co Ltd | リモート型ガス供給装置 |
JP2007317745A (ja) * | 2006-05-23 | 2007-12-06 | Shimadzu Corp | ガス導入装置 |
JP2008285735A (ja) * | 2007-05-21 | 2008-11-27 | Hitachi Kokusai Electric Inc | 基板処理装置 |
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