JPS6453132A - Particle detecting device - Google Patents
Particle detecting deviceInfo
- Publication number
- JPS6453132A JPS6453132A JP62209542A JP20954287A JPS6453132A JP S6453132 A JPS6453132 A JP S6453132A JP 62209542 A JP62209542 A JP 62209542A JP 20954287 A JP20954287 A JP 20954287A JP S6453132 A JPS6453132 A JP S6453132A
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- beam light
- thickness
- area
- spatial filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 title 1
- 230000003287 optical effect Effects 0.000 abstract 1
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
PURPOSE:To expand an area to be detected and to uniform the photon density of laser beam light by providing a projection optical system consisting of a lens system which projects sheet-shaped laser beam light on the area to be detected and a spatial filter in a specific shape. CONSTITUTION:Laser beam light l2 expanded by a beam expander 21 passes through the spatial filter 22 and is polarized in a sectional shape l3 to have a cone-shaped Gaussian distribution, and laser beam light l4 passed through a cylindrical lens 23 is sectioned in a fusiform shape at a focus distance (f) to have nearly uniform light distribution intensity. Further, the thickness W of laser beam light l4 on the plane of a focus (f) is lambdaf/(piW0), where W0 is the thickness of the laser beam l3; when the thickness of the laser beam light l3 incident on the cylindrical lens 23 is varied through the spatial filter 22, the thickness W of the laser beam light l4 on the plane of the focus (f) is controlled, so that the photon density in the area 16 to be detected becomes uniform.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62209542A JPS6453132A (en) | 1987-08-24 | 1987-08-24 | Particle detecting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62209542A JPS6453132A (en) | 1987-08-24 | 1987-08-24 | Particle detecting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6453132A true JPS6453132A (en) | 1989-03-01 |
Family
ID=16574531
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62209542A Pending JPS6453132A (en) | 1987-08-24 | 1987-08-24 | Particle detecting device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6453132A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5286598A (en) * | 1991-10-28 | 1994-02-15 | Fuji Photo Film Co., Ltd. | Silver halide photographic material |
| US6411377B1 (en) * | 1991-04-02 | 2002-06-25 | Hitachi, Ltd. | Optical apparatus for defect and particle size inspection |
| JP2006250686A (en) * | 2005-03-10 | 2006-09-21 | Mitsui Eng & Shipbuild Co Ltd | Flow site meter and laser beam irradiation method |
| WO2020039478A1 (en) * | 2018-08-20 | 2020-02-27 | 株式会社島津製作所 | Detector for chromatography |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5014386A (en) * | 1973-06-06 | 1975-02-14 | ||
| JPS6151541A (en) * | 1984-08-22 | 1986-03-14 | Canon Inc | Optical system for particle analysis |
| JPS61294335A (en) * | 1985-06-21 | 1986-12-25 | Canon Inc | Particle analyzer |
-
1987
- 1987-08-24 JP JP62209542A patent/JPS6453132A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5014386A (en) * | 1973-06-06 | 1975-02-14 | ||
| JPS6151541A (en) * | 1984-08-22 | 1986-03-14 | Canon Inc | Optical system for particle analysis |
| JPS61294335A (en) * | 1985-06-21 | 1986-12-25 | Canon Inc | Particle analyzer |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6411377B1 (en) * | 1991-04-02 | 2002-06-25 | Hitachi, Ltd. | Optical apparatus for defect and particle size inspection |
| US7037735B2 (en) | 1991-04-02 | 2006-05-02 | Hitachi, Ltd. | Apparatus and method for testing defects |
| US7098055B2 (en) | 1991-04-02 | 2006-08-29 | Hitachi, Ltd. | Apparatus and method for testing defects |
| US7443496B2 (en) | 1991-04-02 | 2008-10-28 | Hitachi, Ltd. | Apparatus and method for testing defects |
| US7940383B2 (en) | 1991-04-02 | 2011-05-10 | Hitachi, Ltd. | Method of detecting defects on an object |
| US5286598A (en) * | 1991-10-28 | 1994-02-15 | Fuji Photo Film Co., Ltd. | Silver halide photographic material |
| JP2006250686A (en) * | 2005-03-10 | 2006-09-21 | Mitsui Eng & Shipbuild Co Ltd | Flow site meter and laser beam irradiation method |
| WO2020039478A1 (en) * | 2018-08-20 | 2020-02-27 | 株式会社島津製作所 | Detector for chromatography |
| JPWO2020039478A1 (en) * | 2018-08-20 | 2021-08-10 | 株式会社島津製作所 | Chromatographic detector |
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