JPS6452161A - Exposure measuring method and apparatus - Google Patents

Exposure measuring method and apparatus

Info

Publication number
JPS6452161A
JPS6452161A JP63107388A JP10738888A JPS6452161A JP S6452161 A JPS6452161 A JP S6452161A JP 63107388 A JP63107388 A JP 63107388A JP 10738888 A JP10738888 A JP 10738888A JP S6452161 A JPS6452161 A JP S6452161A
Authority
JP
Japan
Prior art keywords
light beam
relative reflectance
time
line width
exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP63107388A
Other languages
English (en)
Inventor
Rii Fuaasu Derumaa
Aren Hiyuuzu Jiyatsuku
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tektronix Inc
Original Assignee
Tektronix Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tektronix Inc filed Critical Tektronix Inc
Publication of JPS6452161A publication Critical patent/JPS6452161A/ja
Pending legal-status Critical Current

Links

JP63107388A 1987-05-04 1988-04-28 Exposure measuring method and apparatus Pending JPS6452161A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US4606587A 1987-05-04 1987-05-04

Publications (1)

Publication Number Publication Date
JPS6452161A true JPS6452161A (en) 1989-02-28

Family

ID=21941403

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63107388A Pending JPS6452161A (en) 1987-05-04 1988-04-28 Exposure measuring method and apparatus

Country Status (1)

Country Link
JP (1) JPS6452161A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000223413A (ja) * 1998-07-14 2000-08-11 Nova Measuring Instr Ltd フォトリソグラフィ―プロセスを制御するための方法およびシステム

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000223413A (ja) * 1998-07-14 2000-08-11 Nova Measuring Instr Ltd フォトリソグラフィ―プロセスを制御するための方法およびシステム

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