JPS5515073A - Light intensity fluctuation correcting unit - Google Patents
Light intensity fluctuation correcting unitInfo
- Publication number
- JPS5515073A JPS5515073A JP8861278A JP8861278A JPS5515073A JP S5515073 A JPS5515073 A JP S5515073A JP 8861278 A JP8861278 A JP 8861278A JP 8861278 A JP8861278 A JP 8861278A JP S5515073 A JPS5515073 A JP S5515073A
- Authority
- JP
- Japan
- Prior art keywords
- light
- monitor
- optical system
- photoelectric conversion
- output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006243 chemical reaction Methods 0.000 abstract 3
- 230000003287 optical effect Effects 0.000 abstract 3
- 230000001419 dependent effect Effects 0.000 abstract 1
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 abstract 1
- 238000005259 measurement Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/10—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void
- G01J1/16—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void using electric radiation detectors
- G01J1/1626—Arrangements with two photodetectors, the signals of which are compared
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
PURPOSE:To eliminate the measurement error dependent upon intensity fluctuation of a measured light caused by a light source or the optical system, by controlling the correcting circuit for monitor so that the output of this circuit and reference signals may have a fixed relation. CONSTITUTION:The laser light from laser 1 is radiated through deflection element 3 and light path splitter 5. A measuring light is projected to IC mask 9 as a measlred object through focusing optical system 7. The light which passed through IC mask 9 is incident onto measuring photoelectric conversion element 13 and is converted photoelectrically. The reflection light of light path splitter 5 is incident to photoelectric conversion element 21 for monitor by focusing optical system 19 for monitor and is converted photoelectrically. Comparator 25 compares the output of a fixed level from reference level signal generation circuit 23 with the output of photoelectric conversion element 21 and generates control signal 25A. This control signal 25A controls correcting circuits 15a and 15b.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8861278A JPS6031250B2 (en) | 1978-07-20 | 1978-07-20 | Light intensity fluctuation correction device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8861278A JPS6031250B2 (en) | 1978-07-20 | 1978-07-20 | Light intensity fluctuation correction device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5515073A true JPS5515073A (en) | 1980-02-01 |
JPS6031250B2 JPS6031250B2 (en) | 1985-07-20 |
Family
ID=13947624
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8861278A Expired JPS6031250B2 (en) | 1978-07-20 | 1978-07-20 | Light intensity fluctuation correction device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6031250B2 (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5784461U (en) * | 1980-11-12 | 1982-05-25 | ||
JPS5835408A (en) * | 1981-08-28 | 1983-03-02 | Dainippon Printing Co Ltd | Signal processor for checking pattern defect |
EP0075222A1 (en) * | 1981-09-17 | 1983-03-30 | Horiba, Ltd. | Method and compensation circuit for analyzers |
JPS62243337A (en) * | 1986-04-15 | 1987-10-23 | Nec Kyushu Ltd | Contaminant detector for semiconductor substrate |
KR100499864B1 (en) * | 1997-06-12 | 2005-09-30 | 칼 짜이스 에스엠테 아게 | Photometric device |
-
1978
- 1978-07-20 JP JP8861278A patent/JPS6031250B2/en not_active Expired
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5784461U (en) * | 1980-11-12 | 1982-05-25 | ||
JPS5835408A (en) * | 1981-08-28 | 1983-03-02 | Dainippon Printing Co Ltd | Signal processor for checking pattern defect |
EP0075222A1 (en) * | 1981-09-17 | 1983-03-30 | Horiba, Ltd. | Method and compensation circuit for analyzers |
JPS62243337A (en) * | 1986-04-15 | 1987-10-23 | Nec Kyushu Ltd | Contaminant detector for semiconductor substrate |
KR100499864B1 (en) * | 1997-06-12 | 2005-09-30 | 칼 짜이스 에스엠테 아게 | Photometric device |
Also Published As
Publication number | Publication date |
---|---|
JPS6031250B2 (en) | 1985-07-20 |
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