JPS6451795U - - Google Patents
Info
- Publication number
- JPS6451795U JPS6451795U JP14736287U JP14736287U JPS6451795U JP S6451795 U JPS6451795 U JP S6451795U JP 14736287 U JP14736287 U JP 14736287U JP 14736287 U JP14736287 U JP 14736287U JP S6451795 U JPS6451795 U JP S6451795U
- Authority
- JP
- Japan
- Prior art keywords
- pump unit
- casing
- centrifugal pump
- high vacuum
- vacuum pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 7
- 238000009423 ventilation Methods 0.000 claims description 5
- 239000003463 adsorbent Substances 0.000 claims description 2
- 238000005192 partition Methods 0.000 claims description 2
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14736287U JPS6451795U (de) | 1987-09-25 | 1987-09-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14736287U JPS6451795U (de) | 1987-09-25 | 1987-09-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6451795U true JPS6451795U (de) | 1989-03-30 |
Family
ID=31417688
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14736287U Pending JPS6451795U (de) | 1987-09-25 | 1987-09-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6451795U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001032789A (ja) * | 1999-07-23 | 2001-02-06 | Anelva Corp | 分子ポンプ |
-
1987
- 1987-09-25 JP JP14736287U patent/JPS6451795U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001032789A (ja) * | 1999-07-23 | 2001-02-06 | Anelva Corp | 分子ポンプ |
| JP4504476B2 (ja) * | 1999-07-23 | 2010-07-14 | キヤノンアネルバ株式会社 | 分子ポンプ |
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