JPS63140196U - - Google Patents
Info
- Publication number
- JPS63140196U JPS63140196U JP3178587U JP3178587U JPS63140196U JP S63140196 U JPS63140196 U JP S63140196U JP 3178587 U JP3178587 U JP 3178587U JP 3178587 U JP3178587 U JP 3178587U JP S63140196 U JPS63140196 U JP S63140196U
- Authority
- JP
- Japan
- Prior art keywords
- magnetic bearing
- pump
- vacuum side
- rotor
- radial magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006073 displacement reaction Methods 0.000 description 3
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3178587U JPH0617035Y2 (ja) | 1987-03-06 | 1987-03-06 | タ−ボ分子ポンプ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3178587U JPH0617035Y2 (ja) | 1987-03-06 | 1987-03-06 | タ−ボ分子ポンプ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63140196U true JPS63140196U (de) | 1988-09-14 |
| JPH0617035Y2 JPH0617035Y2 (ja) | 1994-05-02 |
Family
ID=30837838
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3178587U Expired - Lifetime JPH0617035Y2 (ja) | 1987-03-06 | 1987-03-06 | タ−ボ分子ポンプ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0617035Y2 (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005042709A (ja) * | 2003-07-10 | 2005-02-17 | Ebara Corp | 真空ポンプ |
-
1987
- 1987-03-06 JP JP3178587U patent/JPH0617035Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005042709A (ja) * | 2003-07-10 | 2005-02-17 | Ebara Corp | 真空ポンプ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0617035Y2 (ja) | 1994-05-02 |