JPS64506Y2 - - Google Patents
Info
- Publication number
- JPS64506Y2 JPS64506Y2 JP2878184U JP2878184U JPS64506Y2 JP S64506 Y2 JPS64506 Y2 JP S64506Y2 JP 2878184 U JP2878184 U JP 2878184U JP 2878184 U JP2878184 U JP 2878184U JP S64506 Y2 JPS64506 Y2 JP S64506Y2
- Authority
- JP
- Japan
- Prior art keywords
- air
- air conditioning
- fan
- air conditioner
- clean room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004378 air conditioning Methods 0.000 claims description 54
- 238000007664 blowing Methods 0.000 claims description 4
- 230000003068 static effect Effects 0.000 description 10
- 238000010586 diagram Methods 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000011144 upstream manufacturing Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000003507 refrigerant Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000011045 prefiltration Methods 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
Landscapes
- Central Air Conditioning (AREA)
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2878184U JPS60140838U (ja) | 1984-02-28 | 1984-02-28 | クリ−ンル−ム用空気調和装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2878184U JPS60140838U (ja) | 1984-02-28 | 1984-02-28 | クリ−ンル−ム用空気調和装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60140838U JPS60140838U (ja) | 1985-09-18 |
| JPS64506Y2 true JPS64506Y2 (en, 2012) | 1989-01-09 |
Family
ID=30526982
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2878184U Granted JPS60140838U (ja) | 1984-02-28 | 1984-02-28 | クリ−ンル−ム用空気調和装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60140838U (en, 2012) |
-
1984
- 1984-02-28 JP JP2878184U patent/JPS60140838U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60140838U (ja) | 1985-09-18 |
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