JPS645013A - Vapor growth equipment - Google Patents
Vapor growth equipmentInfo
- Publication number
- JPS645013A JPS645013A JP16036787A JP16036787A JPS645013A JP S645013 A JPS645013 A JP S645013A JP 16036787 A JP16036787 A JP 16036787A JP 16036787 A JP16036787 A JP 16036787A JP S645013 A JPS645013 A JP S645013A
- Authority
- JP
- Japan
- Prior art keywords
- reaction gas
- maniford
- pipe
- gas feeding
- pipes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To enable the uniform thermal decomposition of all reaction gas, by installing reaction gas feeding pipes capable of transferring in the longitudinal direction in a furnace core pipe, and providing said reaction gas feeding pipes with a ring type gas-jetting part having a plurality of gas-nozzles. CONSTITUTION:A reaction gas feeding pipe 5 is installed so as to be connected to an upper pipe arranged on a rear maniford 3. A reaction gas feeding pipe 6 is installed so as to be connected to a lower pipe arranged on the rear maniford 3. Each of the reaction gas feeding pipes 5, 6 are provided in the inner peripheral side with a plurality of gas-jetting holes 5a, 6a, from which reaction gas is fed uniformly toward the center of a furnace core pipe 1. Each of the reaction gas feeding pipes 5, 6 are arranged in the furnace core tube 1 closed by a front maniford 2, the rear maniford 3 and a cap 4. Through the pipes, several kinds of gas are introduced and heated by a heater 7, which are thermally decomposed to form vapor growth films on the surfaces of mounted semiconductor wafers 8.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16036787A JPS645013A (en) | 1987-06-26 | 1987-06-26 | Vapor growth equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16036787A JPS645013A (en) | 1987-06-26 | 1987-06-26 | Vapor growth equipment |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS645013A true JPS645013A (en) | 1989-01-10 |
Family
ID=15713444
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16036787A Pending JPS645013A (en) | 1987-06-26 | 1987-06-26 | Vapor growth equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS645013A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07130662A (en) * | 1993-11-04 | 1995-05-19 | Nec Corp | Vertical low pressure cvd apparatus |
-
1987
- 1987-06-26 JP JP16036787A patent/JPS645013A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07130662A (en) * | 1993-11-04 | 1995-05-19 | Nec Corp | Vertical low pressure cvd apparatus |
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