JPS6447884A - Regeneration of copper etching bath - Google Patents

Regeneration of copper etching bath

Info

Publication number
JPS6447884A
JPS6447884A JP63088867A JP8886788A JPS6447884A JP S6447884 A JPS6447884 A JP S6447884A JP 63088867 A JP63088867 A JP 63088867A JP 8886788 A JP8886788 A JP 8886788A JP S6447884 A JPS6447884 A JP S6447884A
Authority
JP
Japan
Prior art keywords
regeneration
etching bath
copper etching
copper
bath
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP63088867A
Other languages
English (en)
Inventor
Efu Petouraiteis Kesutsuuteisu
Daburiyu Barudoufu Uorutaa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FUIRUTOROOLE CORP
Original Assignee
FUIRUTOROOLE CORP
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FUIRUTOROOLE CORP filed Critical FUIRUTOROOLE CORP
Publication of JPS6447884A publication Critical patent/JPS6447884A/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/16—Acidic compositions
    • C23F1/18—Acidic compositions for etching copper or alloys thereof
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/46—Regeneration of etching compositions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
JP63088867A 1987-04-13 1988-04-11 Regeneration of copper etching bath Pending JPS6447884A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/037,477 US4880495A (en) 1987-04-13 1987-04-13 Regeneration of copper etch bath

Publications (1)

Publication Number Publication Date
JPS6447884A true JPS6447884A (en) 1989-02-22

Family

ID=21894556

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63088867A Pending JPS6447884A (en) 1987-04-13 1988-04-11 Regeneration of copper etching bath

Country Status (6)

Country Link
US (1) US4880495A (ja)
JP (1) JPS6447884A (ja)
CA (1) CA1309324C (ja)
GB (1) GB2203387B (ja)
MX (1) MX169166B (ja)
NL (1) NL8800887A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003003552A (ja) * 2001-06-22 2003-01-08 Toto Ltd 便器の掃除口蓋

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04320088A (ja) * 1991-04-18 1992-11-10 Cmk Corp プリント配線板の製造方法
US5630950A (en) * 1993-07-09 1997-05-20 Enthone-Omi, Inc. Copper brightening process and bath
US5472618A (en) * 1994-02-07 1995-12-05 Great Western Chemical Company Method for recovering metals from solutions
GB9425090D0 (en) * 1994-12-12 1995-02-08 Alpha Metals Ltd Copper coating
JP3284057B2 (ja) * 1996-06-27 2002-05-20 ワイケイケイ株式会社 スライドファスナー又はそのチェーンの製造方法
US6372055B1 (en) 1999-10-29 2002-04-16 Shipley Company, L.L.C. Method for replenishing baths
DE10326767B4 (de) * 2003-06-13 2006-02-02 Atotech Deutschland Gmbh Verfahren zur Regenerierung von eisenhaltigen Ätzlösungen zur Verwendung beim Ätzen oder Beizen von Kupfer oder Kupferlegierungen sowie eine Vorrichtung zur Durchführung desselben
US7232478B2 (en) 2003-07-14 2007-06-19 Enthone Inc. Adhesion promotion in printed circuit boards
TWI228104B (en) * 2003-07-29 2005-02-21 Min-Shing Tsai Sludge-free wastewater treatment process and apparatus
US11512406B2 (en) * 2019-10-17 2022-11-29 Rohm And Haas Electronic Materials Llc Method of enhancing copper electroplating

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3556883A (en) * 1967-07-21 1971-01-19 Mitsubishi Edogawa Kagaku Kk Method for chemically polishing copper or copper alloy
US3773557A (en) * 1972-03-01 1973-11-20 Wurlitzer Co Solid state battery
US4141850A (en) * 1977-11-08 1979-02-27 Dart Industries Inc. Dissolution of metals

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003003552A (ja) * 2001-06-22 2003-01-08 Toto Ltd 便器の掃除口蓋

Also Published As

Publication number Publication date
CA1309324C (en) 1992-10-27
GB2203387B (en) 1991-04-10
NL8800887A (nl) 1988-11-01
GB8808145D0 (en) 1988-05-11
GB2203387A (en) 1988-10-19
MX169166B (es) 1993-06-23
US4880495A (en) 1989-11-14

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