JPS6447868A - Production of thin film device - Google Patents
Production of thin film deviceInfo
- Publication number
- JPS6447868A JPS6447868A JP62201728A JP20172887A JPS6447868A JP S6447868 A JPS6447868 A JP S6447868A JP 62201728 A JP62201728 A JP 62201728A JP 20172887 A JP20172887 A JP 20172887A JP S6447868 A JPS6447868 A JP S6447868A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- temp
- thin film
- change
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Abstract
PURPOSE:To accurately measure the substrate temp. on a non-contact basis and to produce a high-quality thin film by detecting the change in the magnetic properties of a substrate or substrate carrier due to temp. change. CONSTITUTION:A gaseous reactant is introduced into a chamber 10 from a gas inlet 8, and discharged from a gas outlet 9. The substrate 1 is placed on the substrate carrier 2, and heated to a prescribed temp. by the radiation from a halogen lamp 7 outside the chamber 10. As a result, the gaseous reactant is excited or decomposed to to form the thin film of the reaction product on the surface of the substrate 1. In the thin film device, the lines of magnetic force 4 generated by an electromagnet 3 outside the chamber 10 are passed through the substrate 1 and the carrier 2, and the measured by a superconductive quantum interferometer 5 provided with a cooler 6. The change in the magnetic flux density around the substrate 1 due to the temp. change is detected by this method, and the temp. of the substrate 1 can be accurately measured.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62201728A JPS6447868A (en) | 1987-08-14 | 1987-08-14 | Production of thin film device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62201728A JPS6447868A (en) | 1987-08-14 | 1987-08-14 | Production of thin film device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6447868A true JPS6447868A (en) | 1989-02-22 |
Family
ID=16445949
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62201728A Pending JPS6447868A (en) | 1987-08-14 | 1987-08-14 | Production of thin film device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6447868A (en) |
-
1987
- 1987-08-14 JP JP62201728A patent/JPS6447868A/en active Pending
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