JPS644730Y2 - - Google Patents
Info
- Publication number
- JPS644730Y2 JPS644730Y2 JP18568983U JP18568983U JPS644730Y2 JP S644730 Y2 JPS644730 Y2 JP S644730Y2 JP 18568983 U JP18568983 U JP 18568983U JP 18568983 U JP18568983 U JP 18568983U JP S644730 Y2 JPS644730 Y2 JP S644730Y2
- Authority
- JP
- Japan
- Prior art keywords
- roller
- cargo
- support shaft
- piece
- detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 19
- 230000005856 abnormality Effects 0.000 claims description 8
- 230000002159 abnormal effect Effects 0.000 description 13
- 230000002093 peripheral effect Effects 0.000 description 8
- 239000013013 elastic material Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 238000007789 sealing Methods 0.000 description 2
- 230000004397 blinking Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000000452 restraining effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Control Of Conveyors (AREA)
- Rollers For Roller Conveyors For Transfer (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18568983U JPS6093622U (ja) | 1983-12-02 | 1983-12-02 | 貨物搬送時の異常検出装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18568983U JPS6093622U (ja) | 1983-12-02 | 1983-12-02 | 貨物搬送時の異常検出装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6093622U JPS6093622U (ja) | 1985-06-26 |
JPS644730Y2 true JPS644730Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-02-07 |
Family
ID=30401289
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18568983U Granted JPS6093622U (ja) | 1983-12-02 | 1983-12-02 | 貨物搬送時の異常検出装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6093622U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5078180B2 (ja) * | 2011-01-25 | 2012-11-21 | 東京エレクトロン株式会社 | 基板搬送装置 |
-
1983
- 1983-12-02 JP JP18568983U patent/JPS6093622U/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6093622U (ja) | 1985-06-26 |
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