JPS644586B2 - - Google Patents
Info
- Publication number
- JPS644586B2 JPS644586B2 JP11068785A JP11068785A JPS644586B2 JP S644586 B2 JPS644586 B2 JP S644586B2 JP 11068785 A JP11068785 A JP 11068785A JP 11068785 A JP11068785 A JP 11068785A JP S644586 B2 JPS644586 B2 JP S644586B2
- Authority
- JP
- Japan
- Prior art keywords
- processing strain
- artificial diamond
- applying
- width
- diamond film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims description 28
- 239000010432 diamond Substances 0.000 claims description 27
- 229910003460 diamond Inorganic materials 0.000 claims description 26
- 238000012545 processing Methods 0.000 claims description 21
- 239000013078 crystal Substances 0.000 claims description 12
- 239000011541 reaction mixture Substances 0.000 claims description 11
- 238000000151 deposition Methods 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 6
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 5
- 239000001257 hydrogen Substances 0.000 claims description 5
- 229910052739 hydrogen Inorganic materials 0.000 claims description 5
- 238000002441 X-ray diffraction Methods 0.000 claims description 4
- 229930195733 hydrocarbon Natural products 0.000 claims description 4
- 150000002430 hydrocarbons Chemical class 0.000 claims description 4
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 claims description 3
- 239000004215 Carbon black (E152) Substances 0.000 claims 1
- 230000005855 radiation Effects 0.000 claims 1
- 238000006243 chemical reaction Methods 0.000 description 23
- 239000007789 gas Substances 0.000 description 15
- 238000003754 machining Methods 0.000 description 8
- 238000012733 comparative method Methods 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000001556 precipitation Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 239000012237 artificial material Substances 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11068785A JPS61270372A (ja) | 1985-05-23 | 1985-05-23 | 人工ダイヤモンド皮膜の析出形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11068785A JPS61270372A (ja) | 1985-05-23 | 1985-05-23 | 人工ダイヤモンド皮膜の析出形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61270372A JPS61270372A (ja) | 1986-11-29 |
| JPS644586B2 true JPS644586B2 (ko) | 1989-01-26 |
Family
ID=14541900
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11068785A Granted JPS61270372A (ja) | 1985-05-23 | 1985-05-23 | 人工ダイヤモンド皮膜の析出形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61270372A (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02272374A (ja) * | 1989-04-13 | 1990-11-07 | Tokyo Electron Ltd | 半導体検査装置 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10310494A (ja) * | 1996-05-31 | 1998-11-24 | Ngk Spark Plug Co Ltd | ダイヤモンド被覆膜付き超硬部材の製造方法 |
| JP4373294B2 (ja) * | 2004-07-09 | 2009-11-25 | 日本碍子株式会社 | ハニカム構造体成形用口金、及びその製造方法 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6086096A (ja) * | 1983-10-18 | 1985-05-15 | Natl Inst For Res In Inorg Mater | 膜状ダイヤモンドの析出法 |
| JPS61124573A (ja) * | 1984-11-21 | 1986-06-12 | Toshiba Tungaloy Co Ltd | ダイヤモンド被覆基材及びその製造方法 |
-
1985
- 1985-05-23 JP JP11068785A patent/JPS61270372A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02272374A (ja) * | 1989-04-13 | 1990-11-07 | Tokyo Electron Ltd | 半導体検査装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61270372A (ja) | 1986-11-29 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313115 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| EXPY | Cancellation because of completion of term |