JPS6444920A - Active matrix substrate - Google Patents

Abstract

PURPOSE:To enable display with high contrast and high quality at fine picture element pitches by forming layers which constitute data lines and layers which constitute picture element electrodes in such a manner as to have the layer disposition parted most in the thickness direction of a substrate. CONSTITUTION:A thin metallic film is deposited on the glass substrate 1 and the data lines 8 are patterned and formed. A CVD silicon oxide film and a thin metallic film are deposited as an inter-layer insulating film 13 thereon and gate electrodes 2 and timing lines 3 are patterned and formed. A gate insulating film 4 and a thin amorphous silicon film 5 are then patterned and formed. A transparent conductive film is further deposited thereon and the picture element electrodes 6 are patterned and formed. After contact holes 14 are opened, a thin metallic film is deposited and source electrodes 7 and drain electrodes 9 are patterned and formed. The layer which constitute the data lines and the layer which constitutes and picture element electrodes, therefore, has the layer disposition parted most in the thickness direction. The spacings between the data lines and the picture element electrodes are thereby narrowed in plane and the quantity of the light transmitting through said spacings is decreased and, therefore the display with the high contrast at a high density is enabled.