JPS6444628U - - Google Patents

Info

Publication number
JPS6444628U
JPS6444628U JP1987137993U JP13799387U JPS6444628U JP S6444628 U JPS6444628 U JP S6444628U JP 1987137993 U JP1987137993 U JP 1987137993U JP 13799387 U JP13799387 U JP 13799387U JP S6444628 U JPS6444628 U JP S6444628U
Authority
JP
Japan
Prior art keywords
time change
exposure
light
resist
time
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987137993U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987137993U priority Critical patent/JPS6444628U/ja
Publication of JPS6444628U publication Critical patent/JPS6444628U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Control Of Non-Electrical Variables (AREA)
JP1987137993U 1987-09-09 1987-09-09 Pending JPS6444628U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987137993U JPS6444628U (enExample) 1987-09-09 1987-09-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987137993U JPS6444628U (enExample) 1987-09-09 1987-09-09

Publications (1)

Publication Number Publication Date
JPS6444628U true JPS6444628U (enExample) 1989-03-16

Family

ID=31399925

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987137993U Pending JPS6444628U (enExample) 1987-09-09 1987-09-09

Country Status (1)

Country Link
JP (1) JPS6444628U (enExample)

Similar Documents

Publication Publication Date Title
US4319830A (en) Multispectral light detection system
US4319834A (en) Subtractive color printing device
JPH02639U (enExample)
JPH0723855B2 (ja) 分光器スリット機構
SE8107809L (sv) Fotometer
JPS5912132B2 (ja) 気体流に特定の物質が存在することを検出する装置
JPH03150528A (ja) 任意の分光分布を有する光の発生装置
JPH07117454B2 (ja) 分光光度計
JPH0418454B2 (enExample)
US4231654A (en) Controller for photographic enlarger or the like
JPH0260227U (enExample)
JP3522852B2 (ja) 濃度測定装置
GB943105A (en) Apparatus for photographic printing of colour records
JPS5776422A (en) Measuring apparatus of spectral characteristic
JPS58176603A (ja) 照射用試料箱装置
JPS5839915A (ja) 光センサ分光感度測定装置
JPS6384934U (enExample)
JPS5778140A (en) Forming method for photoresist film
JPS5816533U (ja) 光度計
JPS6236532U (enExample)
JPS61125729U (enExample)
JPH01217742A (ja) 現像モニタ装置
JPH03125344U (enExample)
JPH04343032A (ja) 露光装置用照度計
JPH0159997U (enExample)