JPS6442388A - Quartz crucible for silicon single crystal pulling apparatus - Google Patents
Quartz crucible for silicon single crystal pulling apparatusInfo
- Publication number
- JPS6442388A JPS6442388A JP19746087A JP19746087A JPS6442388A JP S6442388 A JPS6442388 A JP S6442388A JP 19746087 A JP19746087 A JP 19746087A JP 19746087 A JP19746087 A JP 19746087A JP S6442388 A JPS6442388 A JP S6442388A
- Authority
- JP
- Japan
- Prior art keywords
- flange
- crucible
- main body
- cover ring
- slit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE:To increase the charge of silicon polycrystal by connecting freely separably a fitting flange provided to a foot end of truncated inverted conical cover ring with a flange provided to the periphery of an opening of a main body of the crucible, and providing also plural numbers of slit to the upper side of the flange. CONSTITUTION:A fitting flange 14 having U-shaped section provided to a foot end of a truncate inverted conical cover ring 13 coated with SiC or Si3N4 on its surface to >=5mum thickness and having zero air permeability is connected freely separably with a flange 12 provided to at least confronting positions at the periphery of a main body 10 of a crucible housed in a carbon crucible 11, and plural numbers of slit 15 are provided in the peripheral direction with a distance to a cover ring 13 above the flange 14. Silicon polycrystals 16 are filled in a range from the main body of the crucible 10 to the cover ring 13 and the polycrystals 16 are melted by heating, and gaseous Ar supplied to the main body 10 of the crucible and gaseous Si generated from the surface of the melt are discharged through a slit 15.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62197460A JP2559235B2 (en) | 1987-08-07 | 1987-08-07 | Quartz crucible for silicon single crystal pulling equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62197460A JP2559235B2 (en) | 1987-08-07 | 1987-08-07 | Quartz crucible for silicon single crystal pulling equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6442388A true JPS6442388A (en) | 1989-02-14 |
JP2559235B2 JP2559235B2 (en) | 1996-12-04 |
Family
ID=16374870
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62197460A Expired - Lifetime JP2559235B2 (en) | 1987-08-07 | 1987-08-07 | Quartz crucible for silicon single crystal pulling equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2559235B2 (en) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01246190A (en) * | 1988-03-26 | 1989-10-02 | Nippon Telegr & Teleph Corp <Ntt> | Container for crystal growth |
US5260037A (en) * | 1990-03-12 | 1993-11-09 | Osaka Titanium Co., Ltd. | Apparatus for producing silicon single crystal |
US5392729A (en) * | 1989-09-29 | 1995-02-28 | Osaka Titanium Co., Ltd. | Method of producing silicon single crystal |
JP2007161548A (en) * | 2005-12-16 | 2007-06-28 | Mitsubishi Materials Techno Corp | Casting apparatus for polycrystalline silicon |
WO2013015301A1 (en) * | 2011-07-26 | 2013-01-31 | 株式会社ニコン | Crucible for manufacturing compound crystal, apparatus for manufacturing compound crystal, and method for manufacturing compound crystal using crucible |
EP2657372A1 (en) * | 2012-04-28 | 2013-10-30 | Luoyang Hi-Tech Metals Co., Ltd. | Non-monolithic crucible |
JP2016108240A (en) * | 2013-10-30 | 2016-06-20 | 株式会社アライドマテリアル | crucible |
USD771167S1 (en) | 2013-08-21 | 2016-11-08 | A.L.M.T. Corp. | Crucible |
-
1987
- 1987-08-07 JP JP62197460A patent/JP2559235B2/en not_active Expired - Lifetime
Cited By (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01246190A (en) * | 1988-03-26 | 1989-10-02 | Nippon Telegr & Teleph Corp <Ntt> | Container for crystal growth |
US5392729A (en) * | 1989-09-29 | 1995-02-28 | Osaka Titanium Co., Ltd. | Method of producing silicon single crystal |
US5471949A (en) * | 1989-09-29 | 1995-12-05 | Sumitomo Sitix Corporation | Apparatus for producing silicon single crystal |
US5260037A (en) * | 1990-03-12 | 1993-11-09 | Osaka Titanium Co., Ltd. | Apparatus for producing silicon single crystal |
JP2007161548A (en) * | 2005-12-16 | 2007-06-28 | Mitsubishi Materials Techno Corp | Casting apparatus for polycrystalline silicon |
CN103717790A (en) * | 2011-07-26 | 2014-04-09 | 株式会社尼康 | Crucible for manufacturing compound crystal, apparatus for manufacturing compound crystal, and method for manufacturing compound crystal using crucible |
WO2013015301A1 (en) * | 2011-07-26 | 2013-01-31 | 株式会社ニコン | Crucible for manufacturing compound crystal, apparatus for manufacturing compound crystal, and method for manufacturing compound crystal using crucible |
JPWO2013015301A1 (en) * | 2011-07-26 | 2015-02-23 | 株式会社ニコン | Crucible for producing compound crystal, apparatus for producing compound crystal, and method for producing compound crystal using crucible |
EP2657372A1 (en) * | 2012-04-28 | 2013-10-30 | Luoyang Hi-Tech Metals Co., Ltd. | Non-monolithic crucible |
JP2013230970A (en) * | 2012-04-28 | 2013-11-14 | Luoyang Hi-Tech Metals Co Ltd | Non-monolithic crucible |
USD771167S1 (en) | 2013-08-21 | 2016-11-08 | A.L.M.T. Corp. | Crucible |
USD839444S1 (en) | 2013-08-21 | 2019-01-29 | A.L.M.T. Corp. | Crucible |
USD872872S1 (en) | 2013-08-21 | 2020-01-14 | A.L.M.T. Corp. | Crucible |
JP2016108240A (en) * | 2013-10-30 | 2016-06-20 | 株式会社アライドマテリアル | crucible |
JP2016108241A (en) * | 2013-10-30 | 2016-06-20 | 株式会社アライドマテリアル | crucible |
JPWO2015064505A1 (en) * | 2013-10-30 | 2017-03-09 | 株式会社アライドマテリアル | crucible |
Also Published As
Publication number | Publication date |
---|---|
JP2559235B2 (en) | 1996-12-04 |
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