JPS6442388A - Quartz crucible for silicon single crystal pulling apparatus - Google Patents

Quartz crucible for silicon single crystal pulling apparatus

Info

Publication number
JPS6442388A
JPS6442388A JP19746087A JP19746087A JPS6442388A JP S6442388 A JPS6442388 A JP S6442388A JP 19746087 A JP19746087 A JP 19746087A JP 19746087 A JP19746087 A JP 19746087A JP S6442388 A JPS6442388 A JP S6442388A
Authority
JP
Japan
Prior art keywords
flange
crucible
main body
cover ring
slit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19746087A
Other languages
Japanese (ja)
Other versions
JP2559235B2 (en
Inventor
Masami Nakanishi
Hitoshi Kusaka
Tadashi Funayama
Ryuichi Tsuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP62197460A priority Critical patent/JP2559235B2/en
Publication of JPS6442388A publication Critical patent/JPS6442388A/en
Application granted granted Critical
Publication of JP2559235B2 publication Critical patent/JP2559235B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE:To increase the charge of silicon polycrystal by connecting freely separably a fitting flange provided to a foot end of truncated inverted conical cover ring with a flange provided to the periphery of an opening of a main body of the crucible, and providing also plural numbers of slit to the upper side of the flange. CONSTITUTION:A fitting flange 14 having U-shaped section provided to a foot end of a truncate inverted conical cover ring 13 coated with SiC or Si3N4 on its surface to >=5mum thickness and having zero air permeability is connected freely separably with a flange 12 provided to at least confronting positions at the periphery of a main body 10 of a crucible housed in a carbon crucible 11, and plural numbers of slit 15 are provided in the peripheral direction with a distance to a cover ring 13 above the flange 14. Silicon polycrystals 16 are filled in a range from the main body of the crucible 10 to the cover ring 13 and the polycrystals 16 are melted by heating, and gaseous Ar supplied to the main body 10 of the crucible and gaseous Si generated from the surface of the melt are discharged through a slit 15.
JP62197460A 1987-08-07 1987-08-07 Quartz crucible for silicon single crystal pulling equipment Expired - Lifetime JP2559235B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62197460A JP2559235B2 (en) 1987-08-07 1987-08-07 Quartz crucible for silicon single crystal pulling equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62197460A JP2559235B2 (en) 1987-08-07 1987-08-07 Quartz crucible for silicon single crystal pulling equipment

Publications (2)

Publication Number Publication Date
JPS6442388A true JPS6442388A (en) 1989-02-14
JP2559235B2 JP2559235B2 (en) 1996-12-04

Family

ID=16374870

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62197460A Expired - Lifetime JP2559235B2 (en) 1987-08-07 1987-08-07 Quartz crucible for silicon single crystal pulling equipment

Country Status (1)

Country Link
JP (1) JP2559235B2 (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01246190A (en) * 1988-03-26 1989-10-02 Nippon Telegr & Teleph Corp <Ntt> Container for crystal growth
US5260037A (en) * 1990-03-12 1993-11-09 Osaka Titanium Co., Ltd. Apparatus for producing silicon single crystal
US5392729A (en) * 1989-09-29 1995-02-28 Osaka Titanium Co., Ltd. Method of producing silicon single crystal
JP2007161548A (en) * 2005-12-16 2007-06-28 Mitsubishi Materials Techno Corp Casting apparatus for polycrystalline silicon
WO2013015301A1 (en) * 2011-07-26 2013-01-31 株式会社ニコン Crucible for manufacturing compound crystal, apparatus for manufacturing compound crystal, and method for manufacturing compound crystal using crucible
EP2657372A1 (en) * 2012-04-28 2013-10-30 Luoyang Hi-Tech Metals Co., Ltd. Non-monolithic crucible
JP2016108240A (en) * 2013-10-30 2016-06-20 株式会社アライドマテリアル crucible
USD771167S1 (en) 2013-08-21 2016-11-08 A.L.M.T. Corp. Crucible

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01246190A (en) * 1988-03-26 1989-10-02 Nippon Telegr & Teleph Corp <Ntt> Container for crystal growth
US5392729A (en) * 1989-09-29 1995-02-28 Osaka Titanium Co., Ltd. Method of producing silicon single crystal
US5471949A (en) * 1989-09-29 1995-12-05 Sumitomo Sitix Corporation Apparatus for producing silicon single crystal
US5260037A (en) * 1990-03-12 1993-11-09 Osaka Titanium Co., Ltd. Apparatus for producing silicon single crystal
JP2007161548A (en) * 2005-12-16 2007-06-28 Mitsubishi Materials Techno Corp Casting apparatus for polycrystalline silicon
CN103717790A (en) * 2011-07-26 2014-04-09 株式会社尼康 Crucible for manufacturing compound crystal, apparatus for manufacturing compound crystal, and method for manufacturing compound crystal using crucible
WO2013015301A1 (en) * 2011-07-26 2013-01-31 株式会社ニコン Crucible for manufacturing compound crystal, apparatus for manufacturing compound crystal, and method for manufacturing compound crystal using crucible
JPWO2013015301A1 (en) * 2011-07-26 2015-02-23 株式会社ニコン Crucible for producing compound crystal, apparatus for producing compound crystal, and method for producing compound crystal using crucible
EP2657372A1 (en) * 2012-04-28 2013-10-30 Luoyang Hi-Tech Metals Co., Ltd. Non-monolithic crucible
JP2013230970A (en) * 2012-04-28 2013-11-14 Luoyang Hi-Tech Metals Co Ltd Non-monolithic crucible
USD771167S1 (en) 2013-08-21 2016-11-08 A.L.M.T. Corp. Crucible
USD839444S1 (en) 2013-08-21 2019-01-29 A.L.M.T. Corp. Crucible
USD872872S1 (en) 2013-08-21 2020-01-14 A.L.M.T. Corp. Crucible
JP2016108240A (en) * 2013-10-30 2016-06-20 株式会社アライドマテリアル crucible
JP2016108241A (en) * 2013-10-30 2016-06-20 株式会社アライドマテリアル crucible
JPWO2015064505A1 (en) * 2013-10-30 2017-03-09 株式会社アライドマテリアル crucible

Also Published As

Publication number Publication date
JP2559235B2 (en) 1996-12-04

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