JPS644078A - Semiconductor storage device and manufacture thereof - Google Patents
Semiconductor storage device and manufacture thereofInfo
- Publication number
- JPS644078A JPS644078A JP62159388A JP15938887A JPS644078A JP S644078 A JPS644078 A JP S644078A JP 62159388 A JP62159388 A JP 62159388A JP 15938887 A JP15938887 A JP 15938887A JP S644078 A JPS644078 A JP S644078A
- Authority
- JP
- Japan
- Prior art keywords
- mask
- resist
- polycrystalline silicon
- film
- etch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract 4
- 150000004767 nitrides Chemical class 0.000 abstract 3
- 238000005530 etching Methods 0.000 abstract 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 abstract 1
- 229910052785 arsenic Inorganic materials 0.000 abstract 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 abstract 1
- 238000002513 implantation Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 238000005121 nitriding Methods 0.000 abstract 1
- 230000001590 oxidative effect Effects 0.000 abstract 1
- 229910052698 phosphorus Inorganic materials 0.000 abstract 1
- 239000011574 phosphorus Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Landscapes
- Non-Volatile Memory (AREA)
- Semiconductor Memories (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62159388A JPS644078A (en) | 1987-06-25 | 1987-06-25 | Semiconductor storage device and manufacture thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62159388A JPS644078A (en) | 1987-06-25 | 1987-06-25 | Semiconductor storage device and manufacture thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS644078A true JPS644078A (en) | 1989-01-09 |
Family
ID=15692696
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62159388A Pending JPS644078A (en) | 1987-06-25 | 1987-06-25 | Semiconductor storage device and manufacture thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS644078A (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007042988A (ja) * | 2005-08-05 | 2007-02-15 | Sony Corp | トランジスタ、及び、同トランジスタの製造方法、及び、不揮発性記憶素子、及び、同記不揮発性記憶素子を備えた半導体装置 |
-
1987
- 1987-06-25 JP JP62159388A patent/JPS644078A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007042988A (ja) * | 2005-08-05 | 2007-02-15 | Sony Corp | トランジスタ、及び、同トランジスタの製造方法、及び、不揮発性記憶素子、及び、同記不揮発性記憶素子を備えた半導体装置 |
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