JPS6440765A - Gate valve mechanism - Google Patents

Gate valve mechanism

Info

Publication number
JPS6440765A
JPS6440765A JP19695687A JP19695687A JPS6440765A JP S6440765 A JPS6440765 A JP S6440765A JP 19695687 A JP19695687 A JP 19695687A JP 19695687 A JP19695687 A JP 19695687A JP S6440765 A JPS6440765 A JP S6440765A
Authority
JP
Japan
Prior art keywords
plate
valve
gate
drive plate
gate valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19695687A
Other languages
Japanese (ja)
Inventor
Tadashi Mitsui
Kenji Araki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP19695687A priority Critical patent/JPS6440765A/en
Publication of JPS6440765A publication Critical patent/JPS6440765A/en
Pending legal-status Critical Current

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  • Sliding Valves (AREA)

Abstract

PURPOSE:To make it possible to surely press a gate valve against a valve seat upon valve closing operation by coupling a drive plate with the gate plate in a gate valve by use of a link. CONSTITUTION:A valve seat 105 composed of an O-ring 104 is disposed in a groove 103 formed in a side wall around an opening 102. A drive plate 109 is movably inserted on a guide shaft 11 which are attached on the side plate through the intermediary of attaching plates 115, 116. A link 108 is supported at one end to a pin 110 projected from the drive plate, and a gate plate 106 is supported to the other end of the link 108 through the intermediary of a pin 107. The gate valve 106 and the drive plate 109 are urged toward each other by means of a spring 112. When the drive plate 109 is moved up, a valve element 106 abuts against a roller 117 on the attaching plate 115, and thereafter is moved leftward so as to be pressed against the valve seat 105. With this arrangement, it is possible to stably and surely shut off the gate valve with a simple arrangement.
JP19695687A 1987-08-06 1987-08-06 Gate valve mechanism Pending JPS6440765A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19695687A JPS6440765A (en) 1987-08-06 1987-08-06 Gate valve mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19695687A JPS6440765A (en) 1987-08-06 1987-08-06 Gate valve mechanism

Publications (1)

Publication Number Publication Date
JPS6440765A true JPS6440765A (en) 1989-02-13

Family

ID=16366444

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19695687A Pending JPS6440765A (en) 1987-08-06 1987-08-06 Gate valve mechanism

Country Status (1)

Country Link
JP (1) JPS6440765A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0948604A (en) * 1995-05-31 1997-02-18 Kawasaki Heavy Ind Ltd Production of iron carbide and its production device
JP2015204416A (en) * 2014-04-15 2015-11-16 株式会社ディスコ Opening/closing mechanism for carrying-in/carrying-out port, and cleaning device
JP2015215009A (en) * 2014-05-08 2015-12-03 Smc株式会社 Gate valve
EP3239567A1 (en) * 2016-04-27 2017-11-01 VAT Holding AG Gate valve with curved guideway

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6021071B2 (en) * 1977-03-16 1985-05-25 シルバー精工株式会社 Tab brake device for typewriter
JPS61103066A (en) * 1984-10-23 1986-05-21 Tokuda Seisakusho Ltd Vacuum sluice valve

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6021071B2 (en) * 1977-03-16 1985-05-25 シルバー精工株式会社 Tab brake device for typewriter
JPS61103066A (en) * 1984-10-23 1986-05-21 Tokuda Seisakusho Ltd Vacuum sluice valve

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0948604A (en) * 1995-05-31 1997-02-18 Kawasaki Heavy Ind Ltd Production of iron carbide and its production device
US5837031A (en) * 1995-05-31 1998-11-17 Kawasaki Jukogyo Kabushiki Kaisha Method for producing iron carbide
US6071468A (en) * 1995-05-31 2000-06-06 Kawasaki Jukogyo Kabushiki Kaisha Apparatus for producing iron carbide
JP2015204416A (en) * 2014-04-15 2015-11-16 株式会社ディスコ Opening/closing mechanism for carrying-in/carrying-out port, and cleaning device
JP2015215009A (en) * 2014-05-08 2015-12-03 Smc株式会社 Gate valve
EP3239567A1 (en) * 2016-04-27 2017-11-01 VAT Holding AG Gate valve with curved guideway
WO2017186757A1 (en) * 2016-04-27 2017-11-02 Vat Holding Ag Gate valve with curved guide

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