JPS6439793A - Device for composing amplified beam of laser - Google Patents

Device for composing amplified beam of laser

Info

Publication number
JPS6439793A
JPS6439793A JP19525387A JP19525387A JPS6439793A JP S6439793 A JPS6439793 A JP S6439793A JP 19525387 A JP19525387 A JP 19525387A JP 19525387 A JP19525387 A JP 19525387A JP S6439793 A JPS6439793 A JP S6439793A
Authority
JP
Japan
Prior art keywords
laser pulse
laser
optical path
beams
double
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19525387A
Other languages
Japanese (ja)
Inventor
Norio Moribe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP19525387A priority Critical patent/JPS6439793A/en
Publication of JPS6439793A publication Critical patent/JPS6439793A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
    • H01S3/2308—Amplifier arrangements, e.g. MOPA
    • H01S3/2325—Multi-pass amplifiers, e.g. regenerative amplifiers
    • H01S3/2333—Double-pass amplifiers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
    • H01S3/2308—Amplifier arrangements, e.g. MOPA
    • H01S3/2316—Cascaded amplifiers

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

PURPOSE:To double the peak power of a laser output in a shape that linearly polarized light is held by method wherein two beams consisting of beams, which are respectively amplified by double optical path amplifiers, are composed using a polarization component, a slow-wave element and the like. CONSTITUTION:A laser beam generated from a laser pulse generator (a pulsed laser generator) 1 is split by polarization beam splitters 2 and 7. The laser pulse of the two beams, which are respectively amplified by double optical path amplifiers 4 and 9, are composed to progress an optical path 27 and the resultant laser pulse is guided to a laser pulse irradiation object 14. At this time, as the phase of the laser pulse transmitted a polarization beam splitter 11 and the phase of the laser pulse reflected by the splitter 11 are ready-adjusted precisely by a slow-wave element 13, the resultant laser pulse is converted into linearly polarized light.
JP19525387A 1987-08-06 1987-08-06 Device for composing amplified beam of laser Pending JPS6439793A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19525387A JPS6439793A (en) 1987-08-06 1987-08-06 Device for composing amplified beam of laser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19525387A JPS6439793A (en) 1987-08-06 1987-08-06 Device for composing amplified beam of laser

Publications (1)

Publication Number Publication Date
JPS6439793A true JPS6439793A (en) 1989-02-10

Family

ID=16338057

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19525387A Pending JPS6439793A (en) 1987-08-06 1987-08-06 Device for composing amplified beam of laser

Country Status (1)

Country Link
JP (1) JPS6439793A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008078372A (en) * 2006-09-21 2008-04-03 Komatsu Ltd Laser device for exposure equipment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008078372A (en) * 2006-09-21 2008-04-03 Komatsu Ltd Laser device for exposure equipment

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