JPS6438639U - - Google Patents
Info
- Publication number
- JPS6438639U JPS6438639U JP1987133968U JP13396887U JPS6438639U JP S6438639 U JPS6438639 U JP S6438639U JP 1987133968 U JP1987133968 U JP 1987133968U JP 13396887 U JP13396887 U JP 13396887U JP S6438639 U JPS6438639 U JP S6438639U
- Authority
- JP
- Japan
- Prior art keywords
- face
- mask
- end surface
- thickness
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 2
Landscapes
- Cleaning In General (AREA)
Description
第１図は本考案の概略を示す斜視図、第２図は
その要部の断面図、第３図は従来のマスクホルダ
の斜視図、第４図は洗浄装置の断面図である。
FIG. 1 is a perspective view showing the outline of the present invention, FIG. 2 is a sectional view of the main part thereof, FIG. 3 is a perspective view of a conventional mask holder, and FIG. 4 is a sectional view of a cleaning device.
Claims (1)
と、この端面から離隔しかつ相対向して配置する
他端面を持ち、前記半導体用マスクの端面に交差
する第２の端面に接触し更にこの他端面に交差す
る第２の他端面で構成するマスクホルダを具備し
前記端面と前記他端面間の複数箇所に両者の厚み
にほぼ等しく成形し接触部分に溝を設置する回転
体を取付けることを特徴とするマスク洗浄用マス
クホルダ。 A flat plate-shaped mask for semiconductor elements has opposing end surfaces, and a second end surface that is spaced apart from and opposite to this end surface, contacts a second end surface that intersects with the end surface of the semiconductor mask, and further It is characterized by comprising a mask holder constituted by a second other end face intersecting the end face, and mounting rotary bodies formed at a plurality of locations between the end face and the other end face to have a thickness substantially equal to the thickness of both, and providing grooves at the contact portions. Mask holder for mask cleaning.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987133968U JPS6438639U (en) | 1987-09-03 | 1987-09-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987133968U JPS6438639U (en) | 1987-09-03 | 1987-09-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6438639U true JPS6438639U (en) | 1989-03-08 |
Family
ID=31392318
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987133968U Pending JPS6438639U (en) | 1987-09-03 | 1987-09-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6438639U (en) |
-
1987
- 1987-09-03 JP JP1987133968U patent/JPS6438639U/ja active Pending