JPH01174385U - - Google Patents
Info
- Publication number
- JPH01174385U JPH01174385U JP7200788U JP7200788U JPH01174385U JP H01174385 U JPH01174385 U JP H01174385U JP 7200788 U JP7200788 U JP 7200788U JP 7200788 U JP7200788 U JP 7200788U JP H01174385 U JPH01174385 U JP H01174385U
- Authority
- JP
- Japan
- Prior art keywords
- suction plate
- exhaust path
- exhaust
- vacuum suction
- rmax
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 claims 1
- 230000003746 surface roughness Effects 0.000 claims 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Load-Engaging Elements For Cranes (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Description
第１図は本考案実施例による真空吸着プレート
の部分断面図、第２図は本考案に係る他の実施例
による真空吸引プレートの一部分を示す斜視図、
第３図は従来例による真空吸着プレートの縦断面
図である。
１，１０……真空吸着プレート、２，２０……
溝、３，３０……吸着面、４，４０……排気孔。
FIG. 1 is a partial sectional view of a vacuum suction plate according to an embodiment of the present invention, and FIG. 2 is a perspective view showing a part of a vacuum suction plate according to another embodiment of the present invention.
FIG. 3 is a longitudinal sectional view of a conventional vacuum suction plate. 1, 10... Vacuum suction plate, 2, 20...
Groove, 3, 30... adsorption surface, 4, 40... exhaust hole.
Claims (1)
吸着プレートをセラミツクで形成するとともに上
記排気経路の壁の面粗さをＲｍａｘ １ｓ以下と
したことを特徴とする真空吸着プレート。 A vacuum suction plate characterized in that a suction plate having a suction surface, a groove forming an exhaust path, and an exhaust hole is made of ceramic, and the wall of the exhaust path has a surface roughness of Rmax 1s or less.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7200788U JPH0738305Y2 (en) | 1988-05-31 | 1988-05-31 | Vacuum suction plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7200788U JPH0738305Y2 (en) | 1988-05-31 | 1988-05-31 | Vacuum suction plate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01174385U true JPH01174385U (en) | 1989-12-12 |
| JPH0738305Y2 JPH0738305Y2 (en) | 1995-08-30 |
Family
ID=31297185
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7200788U Expired - Lifetime JPH0738305Y2 (en) | 1988-05-31 | 1988-05-31 | Vacuum suction plate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0738305Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0522429U (en) * | 1991-08-31 | 1993-03-23 | 山形日本電気株式会社 | Bellows type wafer vacuum chuck |
| JP2022074028A (en) * | 2020-10-30 | 2022-05-17 | セメス カンパニー，リミテッド | Transfer hand and substrate processing apparatus |
-
1988
- 1988-05-31 JP JP7200788U patent/JPH0738305Y2/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0522429U (en) * | 1991-08-31 | 1993-03-23 | 山形日本電気株式会社 | Bellows type wafer vacuum chuck |
| JP2022074028A (en) * | 2020-10-30 | 2022-05-17 | セメス カンパニー，リミテッド | Transfer hand and substrate processing apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0738305Y2 (en) | 1995-08-30 |